公开(公告)号：US20200312633A1

公开(公告)日：2020-10-01

申请号：US16487703

申请日：2017-11-21

Applicant: LAM RESEARCH CORPORATION

Inventor： Hiran Rajitha RATHNASINGHE ,  Shawn E S TOKAIRIN ,  Jon MCCHESNEY

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: A bottom ring is configured to support a moveable edge ring. The edge ring is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, and a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring. Each of the guide channels includes a first region having a smaller diameter than the guide channel, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring.