公开(公告)号：US10465878B2

公开(公告)日：2019-11-05

申请号：US15680783

申请日：2017-08-18

Applicant: LEDVANCE GmbH

Inventor： Melanie Koehler ,  Armin Konrad

IPC: F21V23/00 ,  F21V9/00 ,  F21K9/275 ,  F21V23/04 ,  F21Y103/10 ,  F21Y115/10 ,  F21Y113/13

Abstract: A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in sizes T5 and T8) comprises a light engine having a first light source which is configured to emit light in the wavelength range above approximately 500 nm and a second light source which is configured to emit light in a different wavelength range from the first light source. The first light source produces light in a spectral range within which photoresists used in photolithography are not sensitive. The second light source produces white light (either alone or in combination with the first light source).

公开(公告)号：US20180051864A1

公开(公告)日：2018-02-22

申请号：US15680783

申请日：2017-08-18

Applicant: LEDVANCE GmbH

Inventor： Melanie Koehler ,  Armin Konrad

IPC: F21V9/00 ,  F21V23/00 ,  F21V23/04 ,  F21K9/275

Abstract: A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in sizes T5 and T8) comprises a light engine having a first light source which is configured to emit light in the wavelength range above approximately 500 nm and a second light source which is configured to emit light in a different wavelength range from the first light source. The first light source produces light in a spectral range within which photoresists used in photolithography are not sensitive. The second light source produces white light (either alone or in combination with the first light source).