公开(公告)号：US20140199426A1

公开(公告)日：2014-07-17

申请号：US14218468

申请日：2014-03-18

Applicant: LG DISPLAY CO., LTD.

Inventor： Doo Hee JANG ,  Tae Joon SONG ,  Dhang KWON ,  Hang Sup CHO ,  Seong Pil CHO ,  Ho Su KIM ,  Jin Hee JANG

IPC: B29C59/02

CPC classification number: B29C59/026 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/6838

Abstract: Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.

Abstract translation: 公开了一种使用其的压印装置和压印方法，其防止在基板上形成图案的过程受到平台度的影响。 该压印装置包括一个室单元，其中进行在基板上形成图案的工艺; 用于支撑其上形成有树脂层的基板的阶段; 安装构件，其位于所述平台上方，并具有附接到所述树脂层的模具构件，以在所述基板上形成所述图案; 以及第一喷射单元，其用于喷射流体以将由所述载物台支撑的所述基板与所述载物台分离，其中所述安装构件沿着与所述载物台分离的所述基板的方向移动所述模具构件，使得所述模具构件和所述树脂层为 互相接触。