公开(公告)号：US20230411409A1

公开(公告)日：2023-12-21

申请号：US17974430

申请日：2022-10-26

Applicant: LG Display Co., Ltd.

Inventor： SungJun YUN ,  PilSang YUN ,  Taegyun KIM ,  MinSu KIM ,  InTak CHO ,  ISak LEE

IPC: H01L27/12

CPC classification number: H01L27/1248 ,  H01L27/124 ,  H01L27/1259

Abstract: Disclosed are a display device and a manufacturing method thereof. More particularly, a display device including a substrate, a buffer layer disposed on the substrate, an active layer disposed on the buffer layer, a gate insulating film disposed on the active layer, and a gate electrode disposed on the gate insulating film, wherein the gate insulating film includes a first portion and a second portion, wherein the first portion is closer to the active layer than the second portion and the second portion is closer to the gate electrode than the first portion, and the gate insulating film includes two or more elements having different component concentrations in the first portion and the second portion, and a manufacturing method thereof are provided to provide a transistor structure having high reliability.