公开(公告)号：US20040046924A1

公开(公告)日：2004-03-11

申请号：US10653909

申请日：2003-09-04

Applicant: LG. PHILIPS LCD CO., LTD.

Inventor： Hwan Kim ,  Ki Choon Park ,  Young Sup Jung ,  Chang Kuk Yang

IPC: G02F001/13

CPC classification number: H01L21/67017 ,  G02F1/136227 ,  G02F2001/136236 ,  H01L21/67028

Abstract: A fabricating method of a liquid crystal display includes the steps of inserting a first substrate into a chamber to perform a dry etching process, removing the first substrate from the chamber after completion of the dry etching process, inserting a dummy substrate into the chamber, injecting inert gas into the chamber to eliminate a process byproduct and a remaining gas, taking the dummy substrate out from the chamber, and inserting a second substrate into the chamber having the process byproduct and the remaining gas removed, to perform an ashing process.

Abstract translation: 液晶显示器的制造方法包括以下步骤：将第一衬底插入腔室以进行干蚀刻处理，在完成干蚀刻工艺之后从腔室中除去第一衬底，将虚设衬底插入腔室中，注入 惰性气体进入腔室以消除过程副产物和剩余气体，将虚拟衬底从腔室中取出，并将第二衬底插入具有过程副产物和除去剩余气体的腔室中，以执行灰化过程。