公开(公告)号：US20040121614A1

公开(公告)日：2004-06-24

申请号：US10673190

申请日：2003-09-30

Applicant: LG. Philips LCD Co., Ltd.

Inventor： Myoung-Kee Baek ,  Kwon-Shik Park

IPC: H01L021/302 ,  H01L021/461 ,  C03C025/68

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G02F1/1362 ,  G03F7/0002 ,  H05K3/0079 ,  H05K3/061 ,  H05K3/1275 ,  H05K2203/0113 ,  H05K2203/0143 ,  H05K2203/0534 ,  H05K2203/1189

Abstract: A method for forming a pattern using a printing process is disclosed in the present invention. The method includes forming a resist layer on a substrate having an etching layer thereon, locating a master having a convex pattern over the substrate, pressing the master against the substrate until the convex pattern of the master directly contacts the etching layer, and removing a portion of the resist layer to expose a surface over the substrate, the removed portion of the resist layer having a width substantially the same as the convex portion of the master.

Abstract translation: 在本发明中公开了使用印刷方法形成图案的方法。 该方法包括在其上具有蚀刻层的衬底上形成抗蚀剂层，将具有凸形图案的母版定位在衬底上，将母板压靠在衬底上，直到母体的凸形图案直接接触蚀刻层，并且去除部分 的抗蚀剂层以暴露在衬底上的表面，抗蚀剂层的去除部分具有与母体的凸部基本相同的宽度。