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公开(公告)号:US20100022058A1
公开(公告)日:2010-01-28
申请号:US12178391
申请日:2008-07-23
申请人: LIH WEI LIN , WEI SHENG HSU , YAN RU YANG , YEN WEN CHEN
发明人: LIH WEI LIN , WEI SHENG HSU , YAN RU YANG , YEN WEN CHEN
IPC分类号: H01L21/336
CPC分类号: H01L29/66621 , H01L29/40114 , H01L29/40117 , H01L29/42352 , H01L29/66825 , H01L29/66833 , H01L29/7923
摘要: A method for preparing a multi-level flash memory comprising the steps of forming a recess in a semiconductor substrate, forming a plurality of storage structures at the sides of the recess, and forming a gate structure having a lower block in the recess and an upper block on the lower block. The storage structures are separated by the gate structure, and each of the storage structures includes a charge-trapping site and an insulation structure surrounding the charge-trapping site.
摘要翻译: 一种制备多级闪速存储器的方法,包括以下步骤:在半导体衬底中形成凹陷,在凹槽的侧面形成多个存储结构,并形成在凹部中具有下部块的栅极结构,以及上部 块在下块上。 存储结构由栅极结构分开,并且每个存储结构包括电荷捕获位点和围绕电荷捕获位点的绝缘结构。
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公开(公告)号:US20100020599A1
公开(公告)日:2010-01-28
申请号:US12178174
申请日:2008-07-23
申请人: LIH WEI LIN , WEI SHENG HSU , YAN RU YANG , YEN WEN CHEN
发明人: LIH WEI LIN , WEI SHENG HSU , YAN RU YANG , YEN WEN CHEN
IPC分类号: G11C16/04
CPC分类号: H01L29/7923 , H01L29/40114 , H01L29/40117 , H01L29/42336 , H01L29/42352 , H01L29/7887
摘要: A multi-level flash memory comprises a semiconductor substrate, a gate structure having a lower block positioned in the semiconductor substrate and an upper block positioned on the semiconductor substrate, and a plurality of storage structures separated by the gate structure. The upper block connects to the lower block of the gate structure, and each of the storage structures includes a charge-trapping site and an insulation structure surrounding the charge-trapping site.
摘要翻译: 多级闪速存储器包括半导体衬底,具有位于半导体衬底中的下部块的栅极结构和位于半导体衬底上的上部块,以及由栅极结构分离的多个存储结构。 上部块连接到栅极结构的下部块,并且每个存储结构包括电荷捕获位置和围绕电荷捕获位点的绝缘结构。
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