公开(公告)号：US3639718A

公开(公告)日：1972-02-01

申请号：US3639718D

申请日：1970-06-15

Applicant: LITTLE INC A

Inventor： CASTONGUAY ROGER A ,  HANLEY BERNARD C ,  MALLAHAN FRANCIS J ,  WENCKUS JOSEPH F

IPC: C30B15/26 ,  C30B15/30 ,  H05B5/00

CPC classification number: C30B15/26 ,  C30B15/30 ,  Y10T117/1008 ,  Y10T117/1012 ,  Y10T117/1056 ,  Y10T117/106 ,  Y10T117/1064 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1076 ,  Y10T117/1092

Abstract: Furnace assembly providing a working volume the pressure in which may range from 10 5 torr to 100 atmospheres. Controlled temperatures up to 4,000* C. are attainable. Two load-bearing rods extending into the furnace are rotated and moved along their vertical axes over a wide speed range. Means are provided continuously to indicate the precise position of each rod, to monitor the operation within the furnace by TV, and to control the operations within the furnace from a remote location.

Abstract translation: 炉组件提供工作体积的压力，其范围可以在10 -5托到100个大气压的范围内。 可控温度高达4000℃。 延伸到炉中的两个承载杆在宽的速度范围内沿其垂直轴线旋转和移动。 连续提供装置以指示每个杆的精确位置，通过TV监视炉内的操作，并从远程位置控制炉内的操作。

公开(公告)号：US3865554A

公开(公告)日：1975-02-11

申请号：US18316971

申请日：1971-09-23

Applicant: LITTLE INC A

Inventor： WENCKUS JOSEPH F ,  CASTONGUAY ROGER A ,  HANFLY BERNARD C ,  MALLAHAN FRANCIS J

IPC: C30B15/00 ,  C30B15/30 ,  B01J17/18

CPC classification number: C30B15/30 ,  Y10T117/1008 ,  Y10T117/1072

Abstract: Furnace assembly providing a working volume the pressure in which may range from 10 5 torr to 135 atmospheres. Controlled temperatures up to 3,000*C are attainable. A crystal-pulling rod and a crucible-supporting rod extend into the furnace. The crystal-pulling rod is rotated and driven translationally through an extended excursion in a slow crystal-pulling mode and relatively fast positioning mode; while the crucible support rod is rotated and driven translationally through a relatively short excursion in a crucible positioning mode. The main furnace housing is lifted up and swung away to permit ready access to the crucible holding zone for interchange of rf coils and crucible holders as well as for easy safe removal of large crystals suspended from the pulling rod. Means are provided continuously to indicate the precise position of the crystal-pulling rod, to monitor the operation within the furnace by TV, and to control the operations within the furnace from a remote location.

Abstract translation: 炉组件提供工作容积的压力，其范围可以在10 -5托到135个大气压的范围内。 可控温度可达3000℃。 拉杆和坩埚支撑杆延伸到炉中。 拉晶杆在慢速拉晶模式和相对快速的定位模式下通过延伸的偏移而平移地驱动和驱动; 而坩埚支撑杆在坩埚定位模式中通过相对较短的偏移而平移地旋转和驱动。 主炉壳体被提起并摆放，以允许准备进入坩埚保持区域，以便互换rf线圈和坩埚保持器，并且易于安全地从悬挂在拉杆上的大晶体去除。 提供连续的装置以指示拉杆的精确位置，通过TV监视炉内的操作，并从远程位置控制炉内的操作。