RADIATION DETECTOR AND ASSOCIATED MANUFACTURING METHOD

    公开(公告)号:US20230016835A1

    公开(公告)日:2023-01-19

    申请号:US17787328

    申请日:2020-12-17

    摘要: A radiation detector includes a stack of layers along a direction Z, the stack comprising: an absorbent layer, a first contact layer, an assembly consisting of at least one intermediate layer, referred to as an intermediate assembly, an upper layer, the first contact layer and the upper layer having a plurality of detection zones and separation zones, a detection zone corresponding to a pixel of the detector, a passivation layer made from a dielectric material, arranged on the upper layer and having openings at the level of the detection zones of the upper layer, the semiconductor layers of the stack being compounds based on elements of groups IIIA and VA of the periodic table of the elements, the second material comprising the VA element antimony and the third material not comprising the VA element antimony.

    IMPROVED BI-SPECTRAL DETECTOR
    5.
    发明申请

    公开(公告)号:US20210288095A1

    公开(公告)日:2021-09-16

    申请号:US17258089

    申请日:2019-06-21

    IPC分类号: H01L27/146

    摘要: An optical detector that is sensitive in at least two infrared wavelength ranges: first spectral band and second spectral band; and having a set of pixels, comprising: an absorbent structure disposed on a lower face of a substrate and comprising a stack of at least one absorbent layer made of semi-conductor material; the detector further comprising a plurality of dielectric resonators on the upper surface of said substrate forming an upper surface metasurface, the metasurface configured to diffuse, deflect and focus in the pixels of the detector in a resonant manner, when illuminated by the incident light, a first beam having at least one first wavelength included in the first spectral band and a second beam having at least one second wavelength included in the second band, the metasurface also being configured so that said first and second beams are focused on different pixels of the detector.

    METHOD FOR IMPROVED MANUFACTURING OF A PHOTODIODE-BASED OPTICAL SENSOR AND ASSOCIATED DEVICE

    公开(公告)号:US20200373455A1

    公开(公告)日:2020-11-26

    申请号:US16635480

    申请日:2018-07-30

    IPC分类号: H01L31/18 H01L31/103

    摘要: A process for fabricating a hybrid optical detector, includes the steps of: assembling, via an assembly layer, on the one hand an absorbing structure and on the other hand a read-out circuit, locally etching, through the absorbing structure, the assembly layer and the read-out circuit up to the contacts, so as to form electrical via-holes, depositing a protective layer on the walls of the via-holes, producing a doped region of a second doping type different from the first doping type by diffusing a dopant into the absorbing structure through the protective layer, the region extending annularly around the via-holes so as to form a diode, depositing a metallization layer on the walls of the via-holes allowing the doped region to be electrically connected to the contact.