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公开(公告)号：USD788134S1
公开(公告)日：2017-05-30
申请号：US29504990
申请日：2014-10-10
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公开(公告)号：US09927798B2
公开(公告)日：2018-03-27
申请号：US14876213
申请日：2015-10-06
发明人： Roger Patrick , Chung Ho Huang , Simon Gosselin , Vincent Wong , Ronald Ramnarine , Neal K. Newton , Mukesh Shah , Kerwin Hoversten , Robert Ahrens , Marco Mora
IPC分类号： G06F19/00 , G05B19/4065
CPC分类号： G05B19/4065 , G05B2219/31202 , G05B2219/45031 , G05B2219/50185
摘要： Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.
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公开(公告)号：USD814488S1
公开(公告)日：2018-04-03
申请号：US29504989
申请日：2014-10-10
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