公开(公告)号：US07826672B2

公开(公告)日：2010-11-02

申请号：US12554083

申请日：2009-09-04

申请人： Lambertus Gerardus Maria Kessels ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

发明人： Lambertus Gerardus Maria Kessels ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

IPC分类号： G06K9/46 ,  H04N1/32 ,  H03M7/00

CPC分类号： G03F7/70291 ,  G03F7/70508

摘要： A system is provided that includes a device having an emissive portion, a memory, and a dictionary decompressor. The device having an emissive portion is configured to produce a patterned beam. The memory is configured to store a compressed representation of a requested dose pattern, comprising two groups of repeating pattern features, to be formed on a surface by the patterned beam. The dictionary decompressor at least partially decompresses the compressed representation. The dictionary decompressor comprises a first dictionary memory configured to store pattern data corresponding to a first group of the two groups of repeating pattern features and a second dictionary memory configured to store pattern data corresponding to a second group of the two groups of repeating pattern features. The repeating pattern features in the first group have one or more differing characteristics than the repeating pattern features in the second group. Related methods are also provided.

摘要翻译： 提供一种包括具有发射部分的设备，存储器和字典解压缩器的系统。 具有发射部分的装置被配置为产生图案化的束。 存储器被配置为存储要由图案化的波束在表面上形成的包括两组重复图案特征的所请求的剂量图案的压缩表示。 字典解压缩器至少部分地解压缩压缩表示。 字典解压缩器包括第一字典存储器，其被配置为存储对应于两组重复图案特征的第一组的图案数据，以及第二字典存储器，其被配置为存储对应于两组重复图案特征的第二组的图案数据。 第一组中的重复图案特征具有与第二组中的重复图案特征相比具有一个或多个不同的特征。 还提供了相关方法。

公开(公告)号：US07606430B2

公开(公告)日：2009-10-20

申请号：US11214055

申请日：2005-08-30

申请人： Lambertus Gerardus Maria Kessels ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

发明人： Lambertus Gerardus Maria Kessels ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

IPC分类号： G06K9/46 ,  H04N1/32 ,  H03M7/00

CPC分类号： G03F7/70291 ,  G03F7/70508

摘要： A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompresses the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.

摘要翻译： 光刻设备包括调制辐射束的单独可控元件的阵列，压缩图案存储器，其通过调制束存储要在衬底上形成的所请求的剂量图案的压缩表示;以及字典解压缩器，至少 部分解压缩压缩表示。 字典解压缩器包括外部字典存储器，第一字典解码器，其通过从外部字典存储器提取对应于对包含在所述外部字典存储器中的外部字典存储器的引用的图案数据的至少部分来解压缩压缩表示的至少一部分 压缩表示和具有内部字典存储器的第二字典解码器，所述第二字典解码器通过从内部字典存储器提取对应于对内部的引用的模式数据的部分来至少部分地解压缩压缩表示的至少一部分 包含在压缩表示中的字典存储器。

公开(公告)号：US20090324111A1

公开(公告)日：2009-12-31

申请号：US12554083

申请日：2009-09-04

申请人： Lambertus Gerardus Maria KESSELS ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

发明人： Lambertus Gerardus Maria KESSELS ,  Patricius Aloysius Jacobus Tinnemans ,  Remco Johannes Van Engelen

IPC分类号： G06K9/36

CPC分类号： G03F7/70291 ,  G03F7/70508

摘要： A system is provided that includes a device having an emissive portion, a memory, and a dictionary decompressor. The device having an emissive portion is configured to produce a patterned beam. The memory is configured to store a compressed representation of a requested dose pattern, comprising two groups of repeating pattern features, to be formed on a surface by the patterned beam. The dictionary decompressor at least partially decompresses the compressed representation. The dictionary decompressor comprises a first dictionary memory configured to store pattern data corresponding to a first group of the two groups of repeating pattern features and a second dictionary memory configured to store pattern data corresponding to a second group of the two groups of repeating pattern features. The repeating pattern features in the first group have one or more differing characteristics than the repeating pattern features in the second group. Related methods are also provided.

摘要翻译： 提供一种包括具有发射部分的设备，存储器和字典解压缩器的系统。 具有发射部分的装置被配置为产生图案化的束。 存储器被配置为存储要由图案化的波束在表面上形成的包括两组重复图案特征的所请求的剂量图案的压缩表示。 字典解压缩器至少部分地解压缩压缩表示。 字典解压缩器包括第一字典存储器，其被配置为存储对应于两组重复图案特征的第一组的图案数据，以及第二字典存储器，其被配置为存储对应于两组重复图案特征的第二组的图案数据。 第一组中的重复图案特征具有与第二组中的重复图案特征相比具有一个或多个不同的特征。 还提供了相关方法。