Mems mirror array and controls
    1.
    发明授权
    Mems mirror array and controls 有权
    Mems镜像数组和控件

    公开(公告)号:US07386201B1

    公开(公告)日:2008-06-10

    申请号:US11728362

    申请日:2007-03-26

    IPC分类号: G02B6/26

    摘要: A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.

    摘要翻译: MEMS反射镜阵列,其中MEMS反射镜通过垂直梳状驱动致动器在两个轴上驱动。 用导电梳齿指引的元件用于提供双轴致动。 MEMS反射镜控制系统在内部枢转支撑框架导电梳指和镜框导电梳指之间提供电压电位,并且在MEMS反射镜阵列支撑框架导电梳指和外部枢转支撑框架导电梳指之间提供电压电位。 在优选实施例中,使用两个MEMS反射镜阵列来在交叉连接开关中提供波束方向。