公开(公告)号：US20080240715A1

公开(公告)日：2008-10-02

申请号：US11728344

申请日：2007-03-26

申请人： Matthew Last ,  Yoshinao Taketomi

发明人： Matthew Last ,  Yoshinao Taketomi

IPC分类号： H04J14/00

CPC分类号： H04Q11/0005 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3582 ,  H04J14/0212 ,  H04Q2011/003 ,  H04Q2011/0039

摘要： An optical fiber alignment unit for the easy precise alignment of optical fibers in and array. In a preferred embodiment the positioning array is incorporated twice in an all optical cross connect switch utilizing MEMS mirrors for cross connecting optical fibers in a first set of optical fibers to optical fibers in a second set of optical fibers. The optical fibers are preferably arranged in rectangular arrays. These arrays include array sizes such as 4×8, 16×16 and 8×16. A preferred embodiment built and tested by Applicants is a modular optical switch in which an input 8×16 array of optical fibers from sixteen eight-fiber ribbons are cross-connected into an output 8×16 array of optical fibers also from sixteen eight-fiber ribbons.

摘要翻译： 一种光纤对准单元，用于将光纤容易地精确对准并排列。 在优选实施例中，定位阵列在全光交叉连接开关中并入两次，所述光交叉连接开关利用MEMS反射镜，用于将第一组光纤中的光纤与第二组光纤中的光纤交叉连接。 光纤优选地以矩形阵列布置。 这些阵列包括阵列大小，例如4x8,16x16和8x16。 由申请人构建和测试的优选实施例是模块化光学开关，其中来自十八个八光纤带的输入8×16光纤阵列也从十八个八光纤带交叉连接到光纤的输出8×16阵列中。

公开(公告)号：US07386201B1

公开(公告)日：2008-06-10

申请号：US11728362

申请日：2007-03-26

申请人： Larry DiRuscio ,  Edward Davis ,  Matthew Last

发明人： Larry DiRuscio ,  Edward Davis ,  Matthew Last

IPC分类号： G02B6/26

CPC分类号： G02B6/357 ,  G02B6/29361 ,  G02B6/29395 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/3584

摘要： A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.

摘要翻译： MEMS反射镜阵列，其中MEMS反射镜通过垂直梳状驱动致动器在两个轴上驱动。 用导电梳齿指引的元件用于提供双轴致动。 MEMS反射镜控制系统在内部枢转支撑框架导电梳指和镜框导电梳指之间提供电压电位，并且在MEMS反射镜阵列支撑框架导电梳指和外部枢转支撑框架导电梳指之间提供电压电位。 在优选实施例中，使用两个MEMS反射镜阵列来在交叉连接开关中提供波束方向。

公开(公告)号：US20100040325A1

公开(公告)日：2010-02-18

申请号：US12462641

申请日：2009-08-05

申请人： Hus Tigli ,  Matthew Last ,  David Sandler

发明人： Hus Tigli ,  Matthew Last ,  David Sandler

IPC分类号： G02B6/42 ,  G02B6/26

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584

摘要： A low cost, multimode optical fiber switch in which a MEMS mirror is used to serially reflect input light from a plurality of input optical fibers into a single output fiber or from a single optical fiber into a plurality of output fibers. In a planned demonstration prototype the output fiber is located in the center of four input fibers. In other preferred embodiments of the present invention an array of MEMS mirrors are utilized with a large bundle of fibers containing both input and output fibers. Each MEMS mirror is adapted to reflect light from a number of input fibers one-at-a-time into a single output fiber or to reflect light from a single input fiber into a number of output fibers one-at-a-time.

摘要翻译： 一种低成本的多模光纤开关，其中使用MEMS反射镜将来自多个输入光纤的输入光线串行地反射到单个输出光纤或从单个光纤到多个输出光纤。 在计划的演示原型中，输出光纤位于四根输入光纤的中心。 在本发明的其它优选实施例中，利用包含输入和输出光纤的大束光纤利用MEMS反射镜阵列。 每个MEMS反射镜适于将来自多个输入光纤的光一次性地反射到单个输出光纤中，或者将来自单个输入光纤的光反射到多个输出光纤中。

公开(公告)号：US07734127B2

公开(公告)日：2010-06-08

申请号：US11728435

申请日：2007-03-26

申请人： Eric Korevaar ,  Yoshinao Taketomi ,  Todd Barrott ,  Hus Tigli ,  Matthew Last ,  Larry Dirvscio ,  Edward Davis

发明人： Eric Korevaar ,  Yoshinao Taketomi ,  Todd Barrott ,  Hus Tigli ,  Matthew Last ,  Larry Dirvscio ,  Edward Davis

IPC分类号： G02B6/26 ,  H04J14/00

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584

摘要： The present invention provides an all optical cross connect switch utilizing two-axis MEMS mirrors for cross connecting optical fibers in a first set of optical fibers to optical fibers in a second set of optical fibers. The optical fibers in the first and second sets of optical fibers are precisely positioned in a first fiber-microlens positioning array to define a first set of parallel collimated cross-connect communication beam paths, with each collimated cross-connect communication beam path connecting an optical fiber in the first set of optical fibers with a MEMS mirror in a first MEMS mirror array. Alignment beams are added to and aligned co-axially with each of the first and second sets of parallel collimated cross-connect communication beams. Two beam direction sensor units are positioned to detect each alignment beam in the first and second sets of alignment beams transmitted through the dichroic mirror and a MEMS control system controls the positions of the MEMS mirrors to connect optical fibers in the first set of optical fibers to any of the optical fibers in the second set of optical fibers.

摘要翻译： 本发明提供了一种全光交叉连接开关，其利用两轴MEMS镜将第一组光纤中的光纤与第二组光纤中的光纤交叉连接。 第一和第二组光纤中的光纤被精确地定位在第一光纤微透镜定位阵列中，以限定第一组平行准直交叉连接通信光束路径，每个准直交叉连接通信光束路径连接光学 第一组光纤中的光纤具有在第一MEMS反射镜阵列中的MEMS反射镜。 对准光束被加入并与第一组和第二组平行准直交叉连接光束中的每一个同轴地对准。 定位两个光束方向传感器单元以检测透过分色镜的第一组和第二组对准光束中的每个对准光束，并且MEMS控制系统控制MEMS反射镜的位置，以将第一组光纤中的光纤连接到 第二组光纤中的任何光纤。

公开(公告)号：US20080239443A1

公开(公告)日：2008-10-02

申请号：US11728435

申请日：2007-03-26

申请人： Eric Korevaar ,  Yoshinao Taketomi ,  Todd Barrott ,  Hus Tigli ,  Matthew Last ,  Larry Dirvscio ,  Edward Davis

发明人： Eric Korevaar ,  Yoshinao Taketomi ,  Todd Barrott ,  Hus Tigli ,  Matthew Last ,  Larry Dirvscio ,  Edward Davis

IPC分类号： G02B26/08

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584

摘要： The present invention provides an all optical cross connect switch utilizing two-axis MEMS mirrors for cross connecting optical fibers in a first set of optical fibers to optical fibers in a second set of optical fibers. The optical fibers in the first and second sets of optical fibers are precisely positioned in a first fiber-microlens positioning array to define a first set of parallel collimated cross-connect communication beam paths, with each collimated cross-connect communication beam path connecting an optical fiber in the first set of optical fibers with a MEMS mirror in a first MEMS mirror array. Alignment beams are added to and aligned co-axially with each of the first and second sets of parallel collimated cross-connect communication beams. Two beam direction sensor units are positioned to detect each alignment beam in the first and second sets of alignment beams transmitted through the dichroic mirror and a MEMS control system controls the positions of the MEMS mirrors to connect optical fibers in the first set of optical fibers to any of the optical fibers in the second set of optical fibers.

摘要翻译： 本发明提供了一种全光交叉连接开关，其利用两轴MEMS镜将第一组光纤中的光纤与第二组光纤中的光纤交叉连接。 第一和第二组光纤中的光纤被精确地定位在第一光纤微透镜定位阵列中，以限定第一组平行准直交叉连接通信光束路径，每个准直交叉连接通信光束路径连接光学 第一组光纤中的光纤具有在第一MEMS反射镜阵列中的MEMS反射镜。 对准光束被加入并与第一组和第二组平行准直交叉连接光束中的每一个同轴地对准。 定位两个光束方向传感器单元以检测透过分色镜的第一和第二组对准光束中的每个对准光束，并且MEMS控制系统控制MEMS反射镜的位置，以将第一组光纤中的光纤连接到 第二组光纤中的任何光纤。

公开(公告)号：US08218918B2

公开(公告)日：2012-07-10

申请号：US12661622

申请日：2010-03-18

申请人： Hus Tigli ,  Matthew Last ,  Yoshi Taketomi

发明人： Hus Tigli ,  Matthew Last ,  Yoshi Taketomi

IPC分类号： G02B6/26

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584

摘要： A scalable optical switch especially useful for switching multimode beams carried by optical fibers. Light from an input fiber is focused by a lens which is moved in an x-y direction perpendicular to the beam direction in order to switch the beam from one output fiber to a different fiber. In preferred embodiments the beam can be directed to any one of as many as 90 output fibers. Techniques for scaling the switch to produce N×N switches with N being large are described. Embodiments of the present invention can also be utilized to create more elaborate fiber optical switches such as an N×N switch and a N2×N switch.

摘要翻译： 一种可扩展的光开关，特别适用于切换由光纤承载的多模光束。 来自输入光纤的光由通过垂直于光束方向的x-y方向移动的透镜聚焦，以将光束从一个输出光纤切换到不同的光纤。 在优选实施例中，光束可以被引导到多达90个输出光纤中的任何一个。 描述了用于缩放开关以产生N为大的N×N个开关的技术。 本发明的实施例也可用于创建更精细的光纤开关，例如N×N开关和N2×N开关。

公开(公告)号：US20070020386A1

公开(公告)日：2007-01-25

申请号：US11186166

申请日：2005-07-20

申请人： Daniel Bedell ,  John Lam ,  Matthew Last ,  Kim Lee ,  Jyh-Shuey Lo ,  Dennis McKean ,  Chun-Ming (Albert) Wang ,  Yi Zheng

发明人： Daniel Bedell ,  John Lam ,  Matthew Last ,  Kim Lee ,  Jyh-Shuey Lo ,  Dennis McKean ,  Chun-Ming (Albert) Wang ,  Yi Zheng

IPC分类号： B05D5/12 ,  B05D5/00 ,  B05D1/36 ,  B05C11/02

CPC分类号： G03F7/40 ,  C25D5/022 ,  C25D7/12 ,  G03F7/2024

摘要： Systems and methods for encapsulation of chemically amplified resist template for low pH electroplating are disclosed. In a first method embodiment, a resist template structure is formed on a wafer. Substantially all surfaces of the resist template structure are encapsulated to form an encapsulated structure. Magnetic materials are plated onto the encapsulated structure.

摘要翻译： 公开了用于封装用于低pH电镀的化学放大抗蚀剂模板的系统和方法。 在第一方法实施例中，在晶片上形成抗蚀剂模板结构。 基本上将抗蚀剂模板结构的所有表面封装形成封装结构。 将磁性材料电镀在封装结构上。

公开(公告)号：US20050266262A1

公开(公告)日：2005-12-01

申请号：US10856090

申请日：2004-05-28

申请人： Christian Bonhote ,  Heather DeSimone ,  John Lam ,  Matthew Last ,  Edward Lee ,  Ian McFadyen

发明人： Christian Bonhote ,  Heather DeSimone ,  John Lam ,  Matthew Last ,  Edward Lee ,  Ian McFadyen

IPC分类号： B32B3/00 ,  B32B15/00

CPC分类号： G11B5/855 ,  G11B5/858 ,  Y10T428/12493 ,  Y10T428/12535 ,  Y10T428/24628 ,  Y10T428/24777 ,  Y10T428/24917 ,  Y10T428/24942

摘要： An electroplated film is deposited over a substrate with a plating frame pattern that includes a plating field defined by a plurality of individual features. By dividing the plating field into a plurality of individual features, the delamination force at any location on the plating field is greatly reduced. Thus, a film with a large stress, such as a high moment film, may be plated to a greater thickness than is possible with conventionally plated films.

摘要翻译： 电镀膜沉积在具有包括由多个单独特征限定的电镀区域的电镀框架图案的衬底上。 通过将电镀区划分为多个单独的特征，电镀场上任何位置的分层力大大降低。 因此，可以将具有大应力的膜，例如高力矩膜，电镀到比常规镀膜可能的厚度更大的厚度。

公开(公告)号：US20110206317A1

公开(公告)日：2011-08-25

申请号：US12661622

申请日：2010-03-18

申请人： Hus Tigli ,  Matthew Last ,  Yoshi Taketomi

发明人： Hus Tigli ,  Matthew Last ,  Yoshi Taketomi

IPC分类号： G02B6/26

CPC分类号： G02B6/359 ,  G02B6/3512 ,  G02B6/3542 ,  G02B6/3556 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3582 ,  G02B6/3584

摘要： A scalable optical switch especially useful for switching multimode beams carried by optical fibers. Light from an input fiber is focused by a lens which is moved in an x-y direction perpendicular to the beam direction in order to switch the beam from one output fiber to a different fiber. In preferred embodiments the beam can be directed to any one of as many as 90 output fibers. Techniques for scaling the switch to produce N×N switches with N being large are described. Embodiments of the present invention can also be utilized to create more elaborate fiber optical switches such as an N×N switch and a N2×N switch.

摘要翻译： 一种可扩展的光开关，特别适用于切换由光纤承载的多模光束。 来自输入光纤的光由通过垂直于光束方向的x-y方向移动的透镜聚焦，以将光束从一个输出光纤切换到不同的光纤。 在优选实施例中，光束可以被引导到多达90个输出光纤中的任何一个。 描述了用于缩放开关以产生N为大的N×N个开关的技术。 本发明的实施例也可用于创建更精细的光纤开关，例如N×N开关和N2×N开关。

公开(公告)号：US07548682B2

公开(公告)日：2009-06-16

申请号：US11728344

申请日：2007-03-26

申请人： Matthew Last ,  Yoshinao Taketomi

发明人： Matthew Last ,  Yoshinao Taketomi

IPC分类号： G02B6/00

CPC分类号： H04Q11/0005 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3582 ,  H04J14/0212 ,  H04Q2011/003 ,  H04Q2011/0039

摘要： An optical fiber alignment unit for the easy precise alignment of optical fibers in and array. In a preferred embodiment the positioning array is incorporated twice in an all optical cross connect switch utilizing MEMS mirrors for cross connecting optical fibers in a first set of optical fibers to optical fibers in a second set of optical fibers. The optical fibers are preferably arranged in rectangular arrays. These arrays include array sizes such as 4×8, 16×16 and 8×16. A preferred embodiment built and tested by Applicants is a modular optical switch in which an input 8×16 array of optical fibers from sixteen eight-fiber ribbons are cross-connected into an output 8×16 array of optical fibers also from sixteen eight-fiber ribbons.

摘要翻译： 一种光纤对准单元，用于将光纤容易地精确对准并排列。 在优选实施例中，定位阵列在全光交叉连接开关中并入两次，所述光交叉连接开关利用MEMS反射镜，用于将第一组光纤中的光纤与第二组光纤中的光纤交叉连接。 光纤优选地以矩形阵列布置。 这些阵列包括阵列大小，例如4x8,16x16和8x16。 由申请人构建和测试的优选实施例是模块化光学开关，其中来自十八个八光纤带的输入8×16光纤阵列也从十八个八光纤带交叉连接到光纤的输出8×16阵列中。