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公开(公告)号:US20060016398A1
公开(公告)日:2006-01-26
申请号:US11137230
申请日:2005-05-25
申请人: Laurent Dubost , Sylvain Hernandez , Hans Jaeger , Karine Landry , Bertrand Vinel , Eugene Zapodeanu , Jacques Schmitt , Redouane EL Bouchikhy
发明人: Laurent Dubost , Sylvain Hernandez , Hans Jaeger , Karine Landry , Bertrand Vinel , Eugene Zapodeanu , Jacques Schmitt , Redouane EL Bouchikhy
IPC分类号: C23C16/00
CPC分类号: H01L21/68742 , C23C16/4586
摘要: A pin assembly for lifting and supporting substrates according to the invention comprises a roller glide for a lift pin with rollers reducing the friction of the vertical pin movement, a ball bearing sole plate with elastic suspension for re-centering the sole plate after one coating cycle and a ball-bearing pin head that lowers the friction between the pin and the substrate and minimizes lateral forces that the substrate can apply on the pin.
摘要翻译: 根据本发明的用于提升和支撑衬底的销组件包括用于具有减小垂直销运动的摩擦的辊的升降销的滚轮滑动,具有弹性悬架的滚珠轴承底板,用于在一个涂覆循环之后重新定心底板 以及球轴承销头,其降低销和衬底之间的摩擦力,并使衬底可以施加在销上的侧向力最小化。