Micro-Electromechanical System (MEMS) Devices and Methods for Packaging the Same
    1.
    发明申请
    Micro-Electromechanical System (MEMS) Devices and Methods for Packaging the Same 审中-公开
    微机电系统(MEMS)装置及其包装方法

    公开(公告)号:US20160187643A1

    公开(公告)日:2016-06-30

    申请号:US14588010

    申请日:2014-12-31

    CPC classification number: G02B26/085 B81B7/007 B81B7/008 G02B26/101

    Abstract: An assembly for a micro-electromechanical system (MEMS) device includes a sealed enclosure, a MEMS component disposed within the sealed enclosure, and a transformer arrangement. The transformer arrangement includes a first wire coil disposed outside the sealed enclosure, and a second wire coil disposed within the sealed enclosure and coupled to the MEMS component, the first and second wire coils being mutually inductively coupled to each other. Upon applying energy to the first wire coil outside the sealed enclosure, electrical energy is induced in the second wire coil within the sealed enclosure which is used to drive the MEMS component.

    Abstract translation: 用于微机电系统(MEMS)装置的组件包括密封外壳,设置在密封外壳内的MEMS部件和变压器装置。 所述变压器装置包括设置在所述密封外壳外部的第一线圈线圈和设置在所述密封外壳内并耦合到所述MEMS部件的第二线圈线圈,所述第一和第二线圈彼此感应耦合。 当将密封外壳上的第一线圈施加能量时,在用于驱动MEMS部件的密封外壳内的第二线圈中产生电能。

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