Abstract:
An assembly for a micro-electromechanical system (MEMS) device includes a sealed enclosure, a MEMS component disposed within the sealed enclosure, and a transformer arrangement. The transformer arrangement includes a first wire coil disposed outside the sealed enclosure, and a second wire coil disposed within the sealed enclosure and coupled to the MEMS component, the first and second wire coils being mutually inductively coupled to each other. Upon applying energy to the first wire coil outside the sealed enclosure, electrical energy is induced in the second wire coil within the sealed enclosure which is used to drive the MEMS component.