公开(公告)号：US20240093691A1

公开(公告)日：2024-03-21

申请号：US18255256

申请日：2021-12-01

申请人： Leybold GmbH

发明人： Michael Pajonk ,  Joeri Coeckelbergs

IPC分类号： F04D27/00

CPC分类号： F04D27/00

摘要： Pump system with at least one pump, in particular a vacuum pump or a compressor, a controller connected to the at least one pump, wherein the controller comprises: a first processing unit directly connected to the at least one pump for providing low level services to the at least one pump, and a second processing unit connected to the first processing unit to provide high level services to the pump system, wherein the second processing unit is connectable to an external network.

公开(公告)号：US11719231B2

公开(公告)日：2023-08-08

申请号：US16463602

申请日：2017-11-10

申请人： Leybold GmbH

发明人： Matthias Nahrwold ,  Michael Pajonk ,  Dirk Schiller ,  Daniel Reinhard ,  Sebastian Walzel

IPC分类号： F04B37/14 ,  F04B35/04 ,  F04B49/06 ,  F04B49/20 ,  F04C25/02 ,  F04C28/08 ,  F04C28/24

CPC分类号： F04B37/14 ,  F04B35/04 ,  F04B49/065 ,  F04B49/20 ,  F04C25/02 ,  F04C28/08 ,  F04C28/24 ,  F04B2201/021 ,  F04B2201/0601 ,  F04B2201/0604 ,  F04B2203/0201 ,  F04B2203/0209 ,  F04B2203/0211

摘要： A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

公开(公告)号：US20210381499A1

公开(公告)日：2021-12-09

申请号：US16463602

申请日：2017-11-10

申请人： Leybold GmbH

发明人： Matthias Nahrwold ,  Michael Pajonk ,  Dirk Schiller ,  Daniel Reinhard ,  Sebastian Walzel

IPC分类号： F04B37/14 ,  F04B49/06 ,  F04C25/02 ,  F04C28/08 ,  F04C28/24

摘要： A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.