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公开(公告)号：US6161294A
公开(公告)日：2000-12-19
申请号：US46318
申请日：1998-03-23
摘要： An apparatus and method for surface profile measurements of large samples. The sample is held by a stationary chuck, while a four-axis (X, Y, Z and theta axis) positioning assembly manipulates and positions an overhead scan assembly and measurement stylus to perform the profilometry. To observe the sample surface in the vicinity of the measurement stylus, an illumination and imaging capability is also provided. Backlash and error are reduced in the Z axis assembly through use of cams and cam followers, and in the scan assembly through use of multiple tensioned wires, with low-friction sliding elements. The apparatus reduces vibration and supports heavy (up to 400 kg) samples while allowing accurate profile measurements.
摘要翻译： 用于大样品表面轮廓测量的装置和方法。 样品由固定的卡盘保持，而四轴（X，Y，Z和θ轴）定位组件操纵和定位架空扫描组件和测量笔，以执行轮廓测量。 为了观察测量笔附近的样品表面，还提供照明和成像能力。 通过使用凸轮和凸轮从动件，在Z轴组件中减少了间隙和误差，并且通过使用具有低摩擦滑动元件的多个张紧线在扫描组件中减少了间隙和误差。 该设备减少振动并支持重（最多400 kg）样品，同时允许精确的轮廓测量。
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公开(公告)号：US4669300A
公开(公告)日：1987-06-02
申请号：US596036
申请日：1984-03-30
申请人： Paul H. Hall , Steven A. Riley , Robert G. Rizos
发明人： Paul H. Hall , Steven A. Riley , Robert G. Rizos
摘要： Adjustment of the force that a stylus exerts on an object in a stylus profiler is accomplished by having a magnetic core, which is operably connected to the stylus and and mounted within an electromagnetic coil. The core moves relative to the coil as the stylus moves vertically. The coil creates a uniform magnetic field within the range of movement of the core. The core is elongated to be subject to uniform fields so that the force that the core-coil combination applies to the stylus is constant irrespective of the vertical position of the stylus.
摘要翻译： 触针对触针分析器中的物体施加的力的调节通过具有可操作地连接到触针并且安装在电磁线圈内的磁芯来实现。 当手写笔垂直移动时，芯线相对于线圈移动。 线圈在芯的运动范围内产生均匀的磁场。 芯被拉伸以受到均匀的场，使得芯线圈组合施加到触针的力是恒定的，而不管触针的垂直位置。
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