公开(公告)号：US12007555B2

公开(公告)日：2024-06-11

申请号：US16948051

申请日：2020-08-28

Applicant: Lumentum Operations LLC

Inventor： Wenlin Jin ,  Maziar Moradi ,  Gonzalo Wills ,  Stephen Bagnald

IPC: G02B26/08 ,  B81B3/00 ,  G01S7/481 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  G01S7/4817 ,  H02N1/008 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0154 ,  B81B2203/0307

Abstract: A micro-electro-mechanical system (MEMS) device may comprise a first layer that includes a stator comb actuator; a second layer that includes a rotor comb actuator; a mirror structure that includes a mirror; and a first set of hinges and a second set of hinges configured to tilt the mirror structure about a first axis of the MEMS device based on a driving torque caused by the stator comb actuator engaging with the rotor comb actuator. The first set of hinges may be configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator. The second set of hinges may be configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.