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公开(公告)号：US10394015B2
公开(公告)日：2019-08-27
申请号：US15470423
申请日：2017-03-27
发明人： John Michael Miller , Wenlin Jin
摘要： A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tillable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the “grooves” or “ridges” are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.
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2.发明授权公开(公告)号：US12116267B2
公开(公告)日：2024-10-15
申请号：US17538784
申请日：2021-11-30
发明人： Wenlin Jin , Edward Wang
CPC分类号： B81B3/0059 , G02B26/0841 , B81B2203/0136
摘要： A micro-electro-mechanical system (MEMS) device includes a mirror; at least one hinge; an electrostatic comb structure; and a control device. The control device causes, for a period of time, a voltage to be supplied to the electrostatic comb structure to cause the electrostatic comb structure to tilt the mirror about the at least one hinge in a particular direction. The control device causes, after the period of time and at an instant of time, the voltage to cease being supplied to the electrostatic comb structure. A tilt angle of the mirror, at the first instant of time, is less than a maximum tilt angle of the mirror in the particular direction. An angular momentum of the mirror, at the instant of time, is greater than zero kilogram meters squared per second in the particular direction.
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公开(公告)号：US12007554B2
公开(公告)日：2024-06-11
申请号：US16917399
申请日：2020-06-30
发明人： Wenlin Jin , Gonzalo Wills
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008 , B81B2201/033 , B81B2203/0136 , B81B2203/058
摘要： A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.
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公开(公告)号：US10585331B2
公开(公告)日：2020-03-10
申请号：US15919979
申请日：2018-03-13
发明人： Roozbeh Ahmadi , Wenlin Jin
摘要： A liquid crystal on substrate (LCOS) assembly may include an LCOS carrier. The LCOS assembly may include at least one thick layer on the LCOS carrier and associated with a threshold thickness. The threshold thickness may be at least 5 micrometers. The LCOS assembly may include a switching engine on the at least one thick layer. The switching engine may include an LCOS die and an LCOS cover glass to enclose an LCOS liquid. The LCOS assembly may be associated with a thermal sensitivity of less than 0.5 millidegrees of curvature per degree Celsius for a particular temperature range.
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公开(公告)号：US20190086762A1
公开(公告)日：2019-03-21
申请号：US15919979
申请日：2018-03-13
发明人： Roozbeh Ahmadi , Wenlin Jin
CPC分类号： G02F1/31 , G02F2203/05 , H04J14/0212 , H04Q11/0005 , H04Q2011/0016
摘要： A liquid crystal on substrate (LCOS) assembly may include an LCOS carrier. The LCOS assembly may include at least one thick layer on the LCOS carrier and associated with a threshold thickness. The threshold thickness may be at least 5 micrometers. The LCOS assembly may include a switching engine on the at least one thick layer. The switching engine may include an LCOS die and an LCOS cover glass to enclose an LCOS liquid. The LCOS assembly may be associated with a thermal sensitivity of less than 0.5 millidegrees of curvature per degree Celsius for a particular temperature range.
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公开(公告)号：US11726311B2
公开(公告)日：2023-08-15
申请号：US17247093
申请日：2020-11-30
发明人： Gonzalo Wills , Wenlin Jin , Jason Blechta , Shane H. Woodside
CPC分类号： G02B26/0841 , B81B3/0083 , B81B2201/042 , B81B2203/0307 , B81B2203/04 , B81B2203/058
摘要： A micro-electro-mechanical system (MEMS) device may include a mirror structure suspended from a first hinge and a second hinge that are arranged to enable the mirror structure to be tilted about a tilt axis. The mirror structure may include a first actuator and a second actuator located on opposite sides of the tilt axis. The MEMS device may include a fixed electrode coupled to first actuator to cause the mirror structure to tilt about the tilt axis in a first direction based on a fixed voltage applied to the fixed electrode. The MEMS device includes a driving electrode coupled to the second actuator to cause the mirror structure to tilt about the tilt axis in a second direction opposite from the first direction based on a driving voltage applied to the driving electrode.
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7.发明授权公开(公告)号：US11500070B2
公开(公告)日：2022-11-15
申请号：US16725603
申请日：2019-12-23
发明人： Jiamin Zheng , Barrie P. Keyworth , Wenlin Jin
摘要： An optical device may include a lens system. The optical device may include a first scanning component to receive an optical beam and to scan the lens system with the optical beam. The optical device may include a second scanning component to receive the optical beam from the lens system and to scan a field of view with the optical beam, where the lens system is positioned between the first scanning component and the second scanning component. The lens system may include a beam expander.
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公开(公告)号：US09606273B2
公开(公告)日：2017-03-28
申请号：US13721307
申请日：2012-12-20
发明人： John Michael Miller , Wenlin Jin
CPC分类号： G02B26/0808 , G02B5/18 , G02B5/1861 , G02B26/0833 , G02B26/0841 , H01S5/06
摘要： A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tiltable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the “grooves” or “ridges” are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.
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公开(公告)号：US11906666B2
公开(公告)日：2024-02-20
申请号：US18054969
申请日：2022-11-14
发明人： Jiamin Zheng , Barrie P. Keyworth , Wenlin Jin
CPC分类号： G01S7/4817 , G02B26/101
摘要： An optical device may include a lens system. The optical device may include a first scanning component to receive an optical beam and to scan the lens system with the optical beam. The optical device may include a second scanning component to receive the optical beam from the lens system and to scan a field of view with the optical beam, where the lens system is positioned between the first scanning component and the second scanning component. The lens system may include a beam expander.
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公开(公告)号：US11892619B2
公开(公告)日：2024-02-06
申请号：US16673180
申请日：2019-11-04
发明人： Wenlin Jin , Stephen Bagnald , Gonzalo Wills
CPC分类号： G02B26/0841 , B81B3/0021 , H02N1/008 , B81B2201/033 , B81B2201/034 , B81B2201/042
摘要： A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator.
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