公开(公告)号：US20180294273A1

公开(公告)日：2018-10-11

申请号：US15481676

申请日：2017-04-07

Applicant: MACRONIX INTERNATIONAL CO., LTD.

Inventor： Ting-Feng Liao ,  Yi-Chen Wang

IPC: H01L27/11556 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  G11C16/04

CPC classification number: H01L27/11556 ,  H01L23/5226 ,  H01L23/5283 ,  H01L23/53204 ,  H01L23/53295

Abstract: A memory device includes a semiconductor substrate, a first conductive layer, a plurality of second conductive layers, a plurality insulating layers, at least one contact plug and at least one dummy plug. The first conductive layer is disposed on the semiconductor substrate. The insulating layers are disposed on the first conductive layer. The second conductive layers are alternatively stacked with the insulating layers and insulated from the first conductive layer. The contact plug passes through the insulating layers and the second conductive layers, insulates from the second conductive layers and electrically contacts to the first conductive layer. The dummy plug, corresponds to the at least one contact plug, passes through the insulating layers and the second conductive layers, and insulates from the second conductive layers and the first conductive layer.

公开(公告)号：US10170492B2

公开(公告)日：2019-01-01

申请号：US15481676

申请日：2017-04-07

Applicant: MACRONIX INTERNATIONAL CO., LTD.

Inventor： Ting-Feng Liao ,  Yi-Chen Wang

IPC: H01L27/115 ,  H01L27/11556 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532 ,  G11C16/04

Abstract: A memory device includes a semiconductor substrate, a first conductive layer, a plurality of second conductive layers, a plurality insulating layers, at least one contact plug and at least one dummy plug. The first conductive layer is disposed on the semiconductor substrate. The insulating layers are disposed on the first conductive layer. The second conductive layers are alternatively stacked with the insulating layers and insulated from the first conductive layer. The contact plug passes through the insulating layers and the second conductive layers, insulates from the second conductive layers and electrically contacts to the first conductive layer. The dummy plug, corresponds to the at least one contact plug, passes through the insulating layers and the second conductive layers, and insulates from the second conductive layers and the first conductive layer.