SEAL RING STRUCTURE, SEMICONDUCTOR DIE, AND METHOD FOR DETECTING CRACKS ON SEMICONDUCTOR DIE

    公开(公告)号:US20190164911A1

    公开(公告)日:2019-05-30

    申请号:US16157274

    申请日:2018-10-11

    Applicant: MEDIATEK INC.

    Abstract: A seal ring structure is provided. The seal ring structure includes a seal ring on a semiconductor substrate. The seal ring includes a first interconnect element and a plurality of second interconnect elements. The first interconnect element is formed on a shallow trench isolation (STI) region and a first group of P-type doping regions over the semiconductor substrate. The second interconnect elements are formed below the first interconnect element and on a second group of P-type doping regions over the semiconductor substrate. The second interconnect elements are electrically separated from the first interconnect element, and the first and second groups of P-type doping regions are separated by the STI region.

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