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公开(公告)号：US10072999B2
公开(公告)日：2018-09-11
申请号：US15233964
申请日：2016-08-11
CPC分类号： G01L13/025 , G01L9/0054 , G01L9/0073 , G01L15/00 , G01L19/0007 , G01L19/143 , H05K999/99
摘要： An air pressure sensing system including a first sensing unit and a second sensing unit is provided. The first sensing unit includes a substrate, a diaphragm, and a supporting member. The substrate has a cavity connected with an exterior environment. The diaphragm is movably and deformably disposed at the substrate and suspended in the cavity. An electrostatic force is provided to the substrate and the diaphragm to move the diaphragm, such that a portion of the base, the supporting member and the diaphragm are contacted with each other and a closed space is formed therebetween in the cavity. The closed space and the exterior environment are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the closed space and the exterior environment. An air pressure sensing method is also provided.
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公开(公告)号：US20170343441A1
公开(公告)日：2017-11-30
申请号：US15233964
申请日：2016-08-11
CPC分类号： G01L13/025 , G01L9/0054 , G01L9/0073 , G01L15/00 , G01L19/0007 , G01L19/143
摘要： An air pressure sensing system including a first sensing unit and a second sensing unit is provided. The first sensing unit includes a substrate, a diaphragm, and a supporting member. The substrate has a cavity connected with an exterior environment. The diaphragm is movably and deformably disposed at the substrate and suspended in the cavity. An electrostatic force is provided to the substrate and the diaphragm to move the diaphragm, such that a portion of the base, the supporting member and the diaphragm are contacted with each other and a closed space is formed therebetween in the cavity. The closed space and the exterior environment are divided by the diaphragm, and the diaphragm is deformed due to an air pressure difference between the closed space and the exterior environment. An air pressure sensing method is also provided.
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