公开(公告)号：US20190288130A1

公开(公告)日：2019-09-19

申请号：US16092850

申请日：2017-04-07

申请人： MEYER BURGER (GERMANY) AG

发明人： Giuseppe CITARELLA ,  Hans-Peter SPERLICH ,  Gunnar KOEHLER ,  Frank WUENSCH ,  Detlef SONTAG ,  Heiko MEHLICH ,  Marcel KOENIG ,  Pierre PAPET

IPC分类号： H01L31/0216 ,  H01L31/0224 ,  H01L31/0376 ,  H01L31/18 ,  H01L31/20 ,  H01L31/0747

摘要： A solar cell with a heterojunction is produced. A first amorphous nano- and/or microcrystalline semiconductor layer is formed on the front face of a crystalline semiconductor substrate to form front face emitter or a front face surface field layer. A second such layer is formed on the rear face of the substrate to form a rear face surface field layer or a rear face emitter. Electrically conductive, transparent front face and rear face electrode layers and a frontal metallic contact layer grid structure are formed. Surface selective frontal PECVD deposition forms an electrically non-conductive, transparent dielectric front face cover layer and with such a thickness to form a closed layer directly on deposition, without additional heat and/or chemical treatment, only on the areas surrounding the frontal contact layer grid structure but not on the frontal contact layer grid structure. Finally, a rear face metallization is formed.