公开(公告)号：US20140161224A1

公开(公告)日：2014-06-12

申请号：US14234169

申请日：2012-09-02

Applicant: MICHA Geffen ,  Doron Reinis

Inventor： MICHA Geffen ,  Doron Reinis

IPC: G01N23/22 ,  G01R31/26

CPC classification number: G01N23/22 ,  G01N23/2252 ,  G01N2223/6113 ,  G01R31/26

Abstract: A method and a system for bump's inspection are disclosed. The inspection done by comparing the volume of the bump's outside contour and the volume the solid materials from which the bump is made and/or analyzing the bump's solid materials ratio. Principally, the inspection id done by preparing an empiric reference table of the emitted energy received from the solid materials, from which a reference proper bump with a given volume is comprised, using ED-XRF (Energy-Dispersive-X-ray-Fluorescence analysis) analyze; obtaining a first calculated volume of the bump, using a 3D image-processing method; adapting the reference table according to the difference between the given volume and the first calculated volume of the bump; performing a second volume calculation of the bump by applying ED-XRF technology. The difference between the first and second volume calculations and the solid material combination are used to inspect the bump.

Abstract translation: 公开了一种用于凸块检查的方法和系统。 通过比较凸块的外部轮廓的体积和制造凸块的固体材料和/或分析凸块的固体材料比来进行检查。 主要是通过使用ED-XRF（能量 - 分散X射线 - 荧光分析法）制备从固体材料接收的发射能量的经验参考表，其中包括具有给定体积的参考适当凸块 ）分析; 使用3D图像处理方法获得凸起的第一计算体积; 根据给定体积与凸起的第一计算体积之间的差异来适应参考表; 通过应用ED-XRF技术对凸点进行第二次体积计算。 第一和第二体积计算和固体材料组合之间的差异用于检查凸块。