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公开(公告)号：US20120091099A1
公开(公告)日：2012-04-19
申请号：US13238721
申请日：2011-09-21
申请人： MICHAEL KIEFER , ANDREAS NEUBER , DENIS DAVID , DANIEL O. CLARK , PHIL CHANDLER
发明人： MICHAEL KIEFER , ANDREAS NEUBER , DENIS DAVID , DANIEL O. CLARK , PHIL CHANDLER
CPC分类号： H01L21/67017
摘要： Methods and apparatus for recovery and reuse of reagents are provided herein. In some embodiments, a system for processing substrates may include a process chamber for processing a substrate; a reagent source coupled to the process chamber to provide a reagent to the process chamber; and a reagent recovery system to collect, and at least one of purify or concentrate the reagent recovered from an effluent exhausted from the process chamber. In some embodiments, a method for recovering unreacted reagent may include providing reagent from a reagent source to a process chamber; exposing a substrate disposed in the process chamber to the reagent, forming an effluent; exhausting the effluent from the process chamber; and recovering unreacted reagent from the effluent in a reagent recovery system.
摘要翻译： 本文提供了试剂的回收和再利用的方法和设备。 在一些实施例中，用于处理衬底的系统可以包括用于处理衬底的处理室; 耦合到处理室以向处理室提供试剂的试剂源; 以及试剂回收系统，用于收集从所述处理室排出的流出物中回收的试剂的净化或浓缩中的至少一种。 在一些实施方案中，用于回收未反应试剂的方法可包括将试剂从试剂源提供至处理室; 将设置在处理室中的衬底暴露于试剂，形成流出物; 从处理室排出污水; 以及在试剂回收系统中从流出物中回收未反应的试剂。
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2.发明申请公开(公告)号：US20110023908A1
公开(公告)日：2011-02-03
申请号：US12838146
申请日：2010-07-16
CPC分类号： B08B7/0035 , B01D53/68 , B01D53/73 , B01D2257/2047 , C23C16/4405
摘要： Methods and apparatus for recovering hydrogen fluoride (HF) are provided herein. In some embodiments, an apparatus includes a system for processing substrates, including a process chamber for processing a substrate; a fluorine generator coupled to the process chamber to provide fluorine (F2) thereto; an abatement system coupled to the process chamber to abate fluorine-containing effluents exhausted from the process chamber and to convert at least a portion of the fluorine-containing effluents into hydrogen fluoride (HF); an HF recovery system configured to at least one of collect, purify, or concentrate the HF converted by the abatement system; and a conduit for providing the recovered hydrogen fluoride (HF) to the fluorine generator or another application in the manufacturing process.
摘要翻译： 本文提供了回收氟化氢（HF）的方法和装置。 在一些实施例中，一种装置包括用于处理衬底的系统，包括用于处理衬底的处理室; 耦合到所述处理室以向其提供氟（F2）的氟发生器; 耦合到处理室的减排系统以消除从处理室排出的含氟流出物并将至少一部分含氟流出物转化为氟化氢（HF）; HF回收系统，被配置为收集，净化或集中由减排系统转换的HF中的至少一个; 以及用于在制造过程中将回收的氟化氢（HF）提供给氟发生器或其他应用的导管。
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公开(公告)号：US20100258510A1
公开(公告)日：2010-10-14
申请号：US12755737
申请日：2010-04-07
IPC分类号： B01D35/00
CPC分类号： B01D53/68 , B01D2251/102 , B01D2251/202 , B01D2257/204 , B01D2257/206 , B01D2257/2066 , B01D2257/708 , B01D2258/0216 , Y02W10/37
摘要： Methods and apparatus for treating effluents in process systems are provided In some embodiments, a system for treating effluent includes a process chamber having a processing volume; an exhaust conduit coupled to the process chamber to remove an effluent from the processing volume; and a reactive species generator coupled to the exhaust conduit to inject a reactive species into the exhaust conduit to treat the effluent, wherein the reactive species generator generates a reactive species comprising at least one of singlet hydrogen, hydrogen ions or hydrogen radicals. In some embodiments, a method for treating effluent includes flowing an effluent from a processing volume of a process system through an exhaust conduit fluidly coupled to the processing volume; treating the effluent in the exhaust conduit with a reactive species comprising at least one of singlet hydrogen, hydrogen ions, or hydrogen radicals; and flowing the treated effluent to an abatement system.
摘要翻译： 在一些实施方案中，用于处理流出物的系统包括具有处理量的处理室; 排出管道，其耦合到所述处理室以从所述处理容积中除去流出物; 以及反应物质发生器，其耦合到所述排气管道以将反应物质注入所述排气管道中以处理所述流出物，其中所述反应物种发生器产生包含单一氢，氢离子或氢自由基中的至少一种的活性物质。 在一些实施方案中，用于处理流出物的方法包括将来自处理系统的处理体积的流出物流经流体耦合到处理体积的排气导管; 用包含单一氢，氢离子或氢自由基中的至少一种的活性物质处理排气管道中的流出物; 并将经处理的流出物流入减排系统。
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4.发明申请公开(公告)号：US20100119420A1
公开(公告)日：2010-05-13
申请号：US12613181
申请日：2009-11-05
申请人： PHIL CHANDLER , DANIEL O. CLARK , FRANK HOOSHDARAN , DAN S. BROWN , BARRY PAGE , ALLEN FOX , GEORGE L. DANSEN, III , JAY JUNG
发明人： PHIL CHANDLER , DANIEL O. CLARK , FRANK HOOSHDARAN , DAN S. BROWN , BARRY PAGE , ALLEN FOX , GEORGE L. DANSEN, III , JAY JUNG
CPC分类号： B01D53/18 , B01D47/06 , B01D47/14 , B01D53/005 , B01D2257/2066 , B01D2257/702 , B01D2258/0216 , C23C16/4412
摘要： Apparatus for improved treatment of effluents are provided herein. In some embodiments, an abatement system may include an exhaust conduit to flow an effluent stream therethrough; a plurality of packed beds disposed in the exhaust conduit to remove non-exhaustible effluents from the effluent stream; one or more spray jets to provide an effluent treating agent between adjacent packed beds, the effluent treating agent to remove non-exhaustible effluents from the effluent stream; and a dripper disposed in the exhaust conduit above an uppermost packed bed to provide the effluent treating agent in large droplets to wet and rinse particulate from an upper surface of the uppermost packed bed substantially without forming fine droplets.
摘要翻译： 本文提供了改善污水处理的设备。 在一些实施例中，减排系统可以包括用于使流出物流流过其中的排气管道; 布置在所述排气管道中以从所述流出物流除去不可排出的流出物的多个填充床; 一个或多个喷射喷嘴以在相邻的填充床之间提供流出物处理剂，所述流出物处理剂从流出物流中除去不可排出的流出物; 以及设置在最上层填充床上方的排气管道中的滴水器，以提供大液滴的流出物处理剂，从而基本上不形成微小的液滴，从最上层的填充床的上表面润湿和漂洗颗粒。
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公开(公告)号：US20110135552A1
公开(公告)日：2011-06-09
申请号：US12957539
申请日：2010-12-01
CPC分类号： B01D53/32 , B01D53/92 , B01D2258/0216 , B01D2259/122 , B01D2259/80 , B01D2259/818 , C23C16/4412
摘要： Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas upstream of the foreline.
摘要翻译： 本文提供了用于处理衬底处理系统的前级管线中的废气的方法和装置。 在一些实施例中，用于处理衬底处理系统的前级管线中的废气的装置包括耦合到处理室的前级管线的等离子体源，耦合到等离子体源上游的前级管线的试剂源和前级气体注入 前级管线注入套件包括用于设定前级气体输送压力设定点的压力调节器，以及耦合以监测前级管线上游气体的输送压力的第一压力表， 。
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公开(公告)号：US20110144791A1
公开(公告)日：2011-06-16
申请号：US12945869
申请日：2010-11-14
申请人： YOUSSEF A. LOLDJ , MAXIME CAYER , JAY J. JUNG , SHAUN CRAWFORD , DANA TRIBULA , DANIEL O. CLARK
发明人： YOUSSEF A. LOLDJ , MAXIME CAYER , JAY J. JUNG , SHAUN CRAWFORD , DANA TRIBULA , DANIEL O. CLARK
IPC分类号： G06F19/00
CPC分类号： G05B19/042 , G05B19/045 , G05B2219/23316 , G05B2219/2612
摘要： Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of CO2 equivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.
摘要翻译： 提供了用于增强控制，监控和记录进入的化学和电力使用以及电子设备制造系统的排放的方法和装置。 在一些实施例中，集成子晶圆厂系统系统可以监视子晶圆厂设备的能量使用。 该工具可以进入许多不同深度的节能模式，例如空闲（生产设备可以恢复到正常生产，质量或吞吐量影响在几秒钟内）的轻微节能，睡眠（生产设备可以在几分钟内恢复更深的节能）， 或休眠（生产设备可能需要几个小时才能恢复，不影响质量或吞吐量）。 在一些实施例中，系统可以监测和显示子晶圆中的所有气体排放以及报告二氧化碳当量排放的半S23方法。 该系统可以从过程工具和辅助设备设备监测废气处理气体和能源使用。
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