公开(公告)号：US20200378757A1

公开(公告)日：2020-12-03

申请号：US16881578

申请日：2020-05-22

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01B11/26 ,  G02B5/18

Abstract: The optical angle sensor comprises a diffraction unit, a light source, a light receiving unit, and a plurality of reflection units. The diffraction unit includes a first diffraction part for generating combined light and a second diffraction part for diffracting a first light and a second light a plurality of times. The plurality of reflection units includes a first reflection unit, a second reflection unit, a third reflection unit that reflects the first light and the second light through the second diffraction part toward the second diffraction part, fourth reflection unit, and fifth reflection unit. The calculating unit, with the rotation of the diffraction unit, calculates the amount of change in the angle based on the change in the interference signal caused by the combined light generated on the light receiving surface.

公开(公告)号：US20180180453A1

公开(公告)日：2018-06-28

申请号：US15391243

申请日：2016-12-27

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA ,  Joseph Daniel TOBIASON

IPC: G01D5/347

CPC classification number: G01D5/34746

Abstract: A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit in which a plurality of light-receiving elements that output a detection signal are arranged. The number of the plurality of light-receiving elements is an even number. A period of the arrangement of the plurality of light-receiving elements is an odd-number multiple of a fundamental period. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.

公开(公告)号：US20140339405A1

公开(公告)日：2014-11-20

申请号：US14270778

申请日：2014-05-06

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01D5/347

CPC classification number: G01D5/34715 ,  G01D5/24438 ,  G01D5/366 ,  G01D5/38

Abstract: A reference signal generation circuit generates a reference signal from a reading result of the reference point detection pattern. The first light-receiving element array includes a first light-receiving element that outputs a first signal, and a second light-receiving element that is disposed in a first direction of the first light-receiving element and outputs a second signal. A second light-receiving element array includes a third light-receiving element that outputs a third signal, and a fourth light-receiving element that is disposed in the first direction of the third light-receiving element and outputs a fourth signal. The second light-receiving element array is disposed in a second direction of the first light-receiving element array. The reference signal generation circuit outputs a reference signal that starts at a period when levels of the first and second signal become equal and ends at a period when levels of the third and fourth signal become equal.

Abstract translation: 参考信号产生电路根据参考点检测图案的读取结果产生参考信号。 第一光接收元件阵列包括输出第一信号的第一光接收元件和设置在第一光接收元件的第一方向上并输出第二信号的第二光接收元件。 第二光接收元件阵列包括输出第三信号的第三光接收元件和设置在第三光接收元件的第一方向上并输出第四信号的第四光接收元件。 第二光接收元件阵列设置在第一光接收元件阵列的第二方向上。 参考信号产生电路输出在第一和第二信号的电平变为相等的时段开始的参考信号，并且在第三和第四信号的电平相等时的周期结束。

公开(公告)号：US20200378803A1

公开(公告)日：2020-12-03

申请号：US16879122

申请日：2020-05-20

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01D5/347

Abstract: The optical encoder includes a scale, a head moves relative to the scale, and a calculating unit performs calculation based on the relative movement. The head includes a light source and a receiving unit having a light receiving surface. The scale includes a step portion on a scale surface. The step portion generates interference light having a contrast pattern on the light receiving surface, and generate the darkest portion with the highest contrast in the contrast pattern. The light source irradiates the step portion with light in a direction inclined with respect to a direction perpendicular to the scale surface. The calculating unit includes an origin calculating unit that identifies the darkest portion from the contrast pattern and calculates the identified darkest portion as the origin position that is a reference of the relative movement between the scale and the head.

公开(公告)号：US20180299300A1

公开(公告)日：2018-10-18

申请号：US16012064

申请日：2018-06-19

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA ,  Joseph Daniel TOBIASON

IPC: G01D5/347

CPC classification number: G01D5/34746 ,  G01D5/34715 ,  G01D5/38

Abstract: A detection head movable relative to a scale detects diffracted light and outputs a detection result. The diffracted light is diffracted by an incremental pattern. A signal processing unit calculates a relative displacement between the scale and the detection head. The detection head includes: a light source emitting the light to the scale; and a detection unit including a light-receiving unit receiving the diffracted light through an optical element, in which the light-receiving elements outputting detection signals are periodically arranged with a predetermined period. The number of the plurality of light-receiving elements is an even number. The predetermined period is a value obtained by multiplying a fundamental period by an odd-number. The fundamental period is a period of interference fringes formed on the light-receiving unit by +1st and −1st order diffracted lights. A width of the light-receiving element is not equal to an integral multiple of the fundamental period.

公开(公告)号：US20210318114A1

公开(公告)日：2021-10-14

申请号：US17224546

申请日：2021-04-07

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01B11/02 ,  G02B5/18 ,  G02B5/26

Abstract: An optical displacement sensor includes: a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray; a reflection unit including a first reflection part and a second reflection part provided at a predetermined angle with respect to the first reflection part; and a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit. The optical displacement sensor is characterized in that the reflection unit reflects the first light ray and the second light ray that are split by the splitting unit and have gone through the diffraction unit from the first reflection part to the second reflection part, and reflects the first light ray and the second light ray that are reflected by the fold-back reflection unit from the second reflection part to the first reflection part.

公开(公告)号：US20170176219A1

公开(公告)日：2017-06-22

申请号：US15384628

申请日：2016-12-20

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01D5/347

CPC classification number: G01D5/34746 ,  G01D5/38

Abstract: A scale has a first pattern area and a second pattern areas disposed with an offset from the first pattern area in a measurement direction by 1/(2×s) of pitch. A detection head detects interference fringes caused by positive s-th-order diffracted beams and negative s-th-order diffracted beams diffracted by the scale, and output a detection result. A signal processing unit detects a reference position based on a position where light intensity is lower than a predetermined value which appears in a light intensity distribution of the interference fringes, and detects incremental positions based on the interference fringes which appear at other positions. The detection head includes a light source, a detecting unit configured to output the detection result of the beams radiated onto light receiving devices to the signal processing unit, and an optical system configured to image positive s-th-order diffracted beams and negative s-th-order diffracted beams on the detecting unit.

公开(公告)号：US20170176218A1

公开(公告)日：2017-06-22

申请号：US15384613

申请日：2016-12-20

Applicant: MITUTOYO CORPORATION

Inventor： Akihide KIMURA

IPC: G01D5/347

CPC classification number: G01D5/34746 ,  G01D5/38

Abstract: A scale is provided with a reference mark and an incremental pattern. A detection head is relatively movable in a measurement direction with respect to the scale, and detects a light intensity distribution of diffracted beams if beams radiated onto the scale are diffracted by the reference mark, and outputs the detection result. A signal processing unit detects a reference position based on a position in the light intensity distribution where light intensity is lower than a predetermined value. The reference position has a plurality of pattern areas having a plurality of patterns arranged with a predetermined pitch in the measurement direction. At least one pattern area of the plurality of pattern areas is disposed with an offset from a neighboring pattern area in the measurement direction.

公开(公告)号：US20140339404A1

公开(公告)日：2014-11-20

申请号：US14270721

申请日：2014-05-06

Applicant: Mitutoyo Corporation

Inventor： Akihide KIMURA

IPC: G01D5/347

CPC classification number: G01D5/347 ,  G01D5/24438 ,  G01D5/366 ,  G01D5/38

Abstract: A reference point detection light-receiving unit receives light from a reference point detection pattern by first to fifth light-receiving elements. The first to fifth light-receiving elements are arranged in a first direction and outputs first to fifth signals, respectively. A reference signal generation circuit outputs a reference signal that starts at a period where a level of a signal, which is obtained by adding first and second signals, and a level of a signal, which is obtained by adding third and fourth signals, will become equal, and ends at a period where a level of a signal, which is obtained by adding the second and third signals, and a level of a signal, which is obtained by adding fourth and fifth signals, become equal.

Abstract translation: 参考点检测光接收单元通过第一至第五光接收元件从参考点检测图案接收光。 第一至第五光接收元件分别布置在第一方向上并输出第一至第五信号。 参考信号发生电路输出参考信号，该参考信号在通过添加第一和第二信号获得的信号的电平和通过添加第三和第四信号而获得的信号电平将变为 相等，并且在通过将第二和第三信号相加获得的信号的电平和通过增加第四和第五信号获得的信号电平变得相等的时段结束。