公开(公告)号：US20240210160A1

公开(公告)日：2024-06-27

申请号：US18394552

申请日：2023-12-22

Applicant: MITUTOYO CORPORATION

Inventor： Bart Geert ENTINK

IPC: G01B9/04 ,  G01B11/06 ,  G02B21/00 ,  G02B21/06

CPC classification number: G01B9/04 ,  G01B11/0608 ,  G02B21/002 ,  G02B21/06

Abstract: The current invention relates to a method of structured lilumination microscopy for determining a height map of a test surface wherein use is made of a structured lilumination microscope. The invention is further related to a structured illumination microscope for determining a height map of a test surface. The microscope comprises a light source, a spatial light modulator, scanner, an optical detector, and a processor.