Abstract:
The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.
Abstract:
A method for calibrating a microscope apparatus (1) having a variable optical magnification system (13) and a detector device (12) is disclosed. First, a calibrating mode is performed, wherein an image (50) of an object (10) is captured at a known reference magnification value, two characteristic reference points (32a, 32b) are determined in the image, a reference distance (34) between the two reference points is determined, and a correlation is determined between the reference distance and the reference magnification value. Later, a measuring mode is implemented, in which a current image (51) of the object (10) is captured at a second magnification value, the two characteristic reference points (52a, 52b) are identified therein, a current distance (54) between the current reference points is determined, and the second magnification value is determined from the current distance (54) based on the correlation between the reference distance (34) and the reference magnification value.
Abstract:
Examination of a microscopic specimen is described. Height information for a respective plurality of lateral regions of the specimen is obtained from each of multiple specimen recordings, in which the height information of each specimen recording is limited to a respective height measurement range and the height measurement ranges of different specimen recordings are different. An overall image is calculated from the specimen recordings, in which overall image height information of the different specimen recordings is combined. Specimen recordings are recorded at such heights that: the height measurement ranges of different specimen recordings overlap each other, common lateral regions are identified in two respective specimen recordings for which lateral regions height information could be obtained in both specimen recordings, and a link of the height information of different specimen recordings is determined on the basis of the height information of different specimen recordings for at least one common lateral region.
Abstract:
A focusing device that includes a differential interference prism used in differential interference observation in a focusing detection optical system includes: a light source that emits light with which a measurement surface of an observation sample is irradiated; a photo detection unit that detects light from the measurement surface; a focusing detection unit that detects an error signal near a focusing point of the measurement surface on the basis of an output signal from the photo detection unit; and a condition changing unit that changes an acquisition condition of the error signal.
Abstract:
In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.
Abstract:
A method includes sequentially acquiring phase-shifted images of an optical source in a plurality of predetermined positions in the z plane to form a plurality of image frame sequences; determining from the plurality of image frame sequences at least one phase-related characteristic associated with each predetermined position of the optical source in the z plane; and storing the at least one phase-related characteristic and the predetermined positions of the optical source in the z plane.
Abstract:
A spectroscope including: a spectral element that is configured to spectrally separate signal light; a first optical system that is configured to condense spectroscopic light spectrally separated by the spectral element; and an optical receiver that is configured to receive the spectroscopic light; wherein the optical receiver includes a plurality of regions different sensitivities with respect to a wavelength characteristics of the spectroscopic light.
Abstract:
A thickness-information acquisition apparatus includes: an image acquisition section configured to acquire a phase-difference image of a sample; a correlation-distribution computation section configured to compute a correlation distribution of an image in the phase-difference image with respect to pixels of another image in the phase-difference image; and a thickness-information acquisition section configured to acquire information on the thickness of the sample in accordance with the correlation distribution.
Abstract:
The invention relates to an incoherent light full field interference microscopy device for the imaging of a volumetric scattering sample (106). The device comprises an interference device (100) between a reference wave (401), produced by reflection of an incident wave by a reflective surface (105) of a reference arm of the interference device, and an object wave (402) produced by backscattering of the incident wave by a slice of the sample, an acquisition device (108) for at least a first interference signal and at least a second interference signal resulting from the interference of the reference and object waves, the at least two interference signals having a phase difference, an processing unit (403) for calculating an image of the slice of the sample, based on said interference signals. The interference device also comprises an optical element (404) for modifying the phase of the wavefront, and the microscopy device comprises a control unit (405) for the optical element, linked to the processing unit (403), the optical phase modification element being controlled by optimizing a statistical parameter of at least a part of the image calculated by the processing unit.
Abstract:
The invention relates to a method for the 3-dimensional measurement of a sample with a measuring system having a 3-dimensional measuring space and comprising a laser scanning microscope, characterised by—providing the measuring system with a 3-dimensional virtual reality device,—creating the 3-dimensional virtual space of the measuring space using the 3-dimensional virtual reality device,—allowing for selecting an operation in the virtual space,—providing real-time unidirectional or bidirectional convection between the measuring space and the virtual space such that an operation selected in the virtual space is performed in the measuring space and data measured in the measuring space is displayed in the virtual space. The invention further relates to a measuring system for the 3-dimensional measurement of a sample, the measuring system having a 3-dimensional measuring space and comprising a laser scanning microscope, characterised by further comprising a 3-dimensional virtual reality device for displaying a 3-dimensional virtual space of the measuring space, and a real-time unidirectional or bidirectional connection is provided between the laser scanning microscope and the 3-dimensional virtual reality device.