公开(公告)号：US09881400B2

公开(公告)日：2018-01-30

申请号：US14808230

申请日：2015-07-24

Applicant: MITUTOYO CORPORATION

Inventor： Adriaan Tiemen Zuiderweg ,  Johannes Anna Quaedackers ,  Harm Visscher

IPC: G06T11/20 ,  G01B11/24 ,  G01B11/245

CPC classification number: G06T11/206 ,  G01B11/2441 ,  G01B11/245 ,  G01B2210/52

Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.