公开(公告)号：US20180274914A1

公开(公告)日：2018-09-27

申请号：US15933840

申请日：2018-03-23

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki MATSUMIYA ,  Tomoyuki MIYAZAKI ,  Shuichi KAMIYAMA ,  Hideyuki ARAI

IPC: G01B21/06 ,  G01B13/03 ,  G05D16/00 ,  G01B21/04 ,  G01B5/008

Abstract: A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be movable by the second slide mechanism; a probe held to be movable by the third slide mechanism; pneumatic cylinders for connecting slider parts and guide parts included in each slide mechanism; and automatic pressure regulators for respectively changing air pressures supplied to each pneumatic cylinder in accordance with measurement postures of the measuring head.

公开(公告)号：US20180023936A1

公开(公告)日：2018-01-25

申请号：US15647446

申请日：2017-07-12

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki ARAI ,  Kazuya IWASAKI ,  Minoru TANAKA ,  Shuichi KAMIYAMA ,  Kazuhiko HIDAKA

IPC: G01B5/016 ,  G01B5/02 ,  G01B5/14 ,  G01B5/00 ,  G01B5/12

CPC classification number: G01B5/016 ,  G01B5/0007 ,  G01B5/02 ,  G01B5/12 ,  G01B5/143

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.

公开(公告)号：US20160299028A1

公开(公告)日：2016-10-13

申请号：US15092065

申请日：2016-04-06

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki ARAI ,  Kazuhiko HIDAKA ,  Minoru TANAKA ,  Tomoyuki MIYAZAKI ,  Takeshi YAMAMOTO

IPC: G01L25/00

CPC classification number: G01L25/00

Abstract: A stylus support portion moveable in an X direction is arranged separate from a fixed portion. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (+) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (−) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A first permanent magnet is provided on the end portion of the stylus support portion in the X (+) direction. A second permanent magnet is provided on the end portion of the stylus support portion in the X (−) direction. A third permanent magnet is provided to the fixed portion so that a magnetic force in the X direction acts on an area between the first permanent magnet and the third permanent magnet. A fourth permanent magnet is provided to the fixed portion so that the magnetic force in the X direction acts on an area between the second permanent magnet and the fourth permanent magnet.

Abstract translation: 可在X方向上移动的触针支撑部分与固定部分分开布置。 板簧具有在X（+）方向上固定到触针支撑部的端部的第一端，固定到固定部的第二端和面向X方向的主表面。 板簧具有第一端，其固定在X（ - ）方向上的触针支撑部分的端部，固定到固定部分的第二端和面向X方向的主表面。 第一永久磁铁在X（+）方向上设置在触针支撑部分的端部上。 在X（ - ）方向上的触针支撑部分的端部设有第二永磁体。 第三永磁体设置在固定部分上，使得X方向上的磁力作用在第一永磁体和第三永久磁铁之间的区域上。 第四永磁体设置在固定部分上，使得X方向上的磁力作用在第二永磁体和第四永久磁铁之间的区域上。

公开(公告)号：US20220034650A1

公开(公告)日：2022-02-03

申请号：US17386199

申请日：2021-07-27

Applicant: MITUTOYO CORPORATION

Inventor： Lukasz REDLARSKI ,  Hideyuki ARAI

IPC: G01B11/25 ,  G01B11/06

Abstract: A shape measuring apparatus applies, to a light beam, a periodic pattern having periodicity in a direction perpendicular to an optical axis and displaceable in the direction perpendicular to the optical axis, relatively displaces a focal point of an objective lens in a direction parallel to the optical axis, and calculates, based on amplitude of intensity of the light beam detected by a photodetector, face shape data on the object to be measured. Then, a top surface measuring step of acquiring face shape data on a top surface of the object to be measured, and a bottom surface measuring step of acquiring face shape data on a bottom surface of the object to be measured by transmitting through the top surface of the object to be measured and aligning the focal point of the objective lens on the bottom surface of the object to be measured are performed.