Abstract:
A surface texture measuring machine includes a display section, a touch panel arranged on the display section, a key group, a display control section that causes a first setting screen to be displayed on the display section, a setting section that creates a measurement condition in accordance with an input operation on the first setting screen through the touch panel, a storage that stores the measurement condition, and an input control section that switches a state of the touch panel between a disabled state and an enabled state. When the touch panel is in the disabled state, the display control section causes a second setting screen to be displayed on the display section in accordance with the input operation through the key group and the setting section reads the measurement condition from the storage in accordance with the input operation on the second setting screen through the key group.
Abstract:
A surface texture measuring machine includes: a parameter setting unit configured to set one or more parameters related to a surface texture of a workpiece; a measurement unit configured to calculate a measurement value corresponding to each of the parameters on the basis of displacement measurement data obtainable by scanning a surface of the workpiece or a master workpiece; a judgment value calculation unit configured to calculate a judgment value corresponding to each of the parameters with an assumption that the measurement value of the master workpiece is defined as a reference value and a value having a predetermined ratio relative to the reference value is defined as a tolerance; and a judgment unit configured to compare the measurement value of the workpiece and the judgment value for each of the parameters.
Abstract:
In a control method of a drive stage device, a stage is floated on an air bearing, then a height of the stage while floating on the air bearing is measured as a first height. A work piece is placed on the stage and a height of the stage while holding the work piece is measured as a second height. A difference between the first height and the second height is calculated as a drop amount, and a weight of the work piece is calculated based on the drop amount. An upper limit speed of one of rotational drive and horizontal movement of the stage is determined based on the calculated work piece weight. A speed of the one of the rotational drive and the horizontal movement of the stage is controlled so as to not exceed the upper limit speed.
Abstract:
A surface texture measuring method includes: moving a stylus toward an origin point; and, when the stylus reaches the origin point, braking the stylus to be stopped after overrunning the origin point waiting for a measurement start command (approach section setting operation); bringing the stopped stylus into contact with a target portion of the workpiece (workpiece setting operation); moving the stopped stylus in a measurement direction reverse to the overrunning (approach operation); and, when the stylus passes the origin point in the approach operation, continuing the movement of the stylus while acquiring data detected by the detector (measurement operation).
Abstract:
A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki=rDATAi/DATAi, a display resolution DIVi=DATAi/ADi, and a corrected display resolution cDIVi=DIVi×ki; and displaying the corrected display value cDIVi=DIVi×ki.