公开(公告)号：US20190041187A1

公开(公告)日：2019-02-07

申请号：US16049130

申请日：2018-07-30

Applicant: MITUTOYO CORPORATION

Inventor： Shimpei MATSUURA

IPC: G01B9/02 ,  G02B27/28 ,  G01B11/24

CPC classification number: G01B9/02072 ,  G01B9/02011 ,  G01B9/02081 ,  G01B9/02083 ,  G01B11/2441 ,  G01B2290/70 ,  G02B27/283

Abstract: An optical system includes a polarized light phase shift optical circuit that includes a polarizing beam splitter that splits light having a coherence length shorter than a difference in optical path length between a normal optical path and a delay optical path having an optical path length longer than the normal optical path, the light being split into normal light, which travels along the normal optical path, and delay light, which travels along the delay optical path; a separator where the normal light and the delay light are individually emitted at a reference flat and the separator divides the reflected light that reflects off the reference flat into a plurality of light beams; and a plurality of image capture elements that respectively detect the intensities of the plurality of divided light beams, and the optical system also includes an information processor that includes a calibrator.