公开(公告)号：US20170307546A1

公开(公告)日：2017-10-26

申请号：US15472870

申请日：2017-03-29

Applicant: MITUTOYO CORPORATION

Inventor： Shinji FUKUDA

IPC: G01N21/958 ,  G01N21/88

CPC classification number: G01N21/958 ,  G01M11/0278 ,  G01N21/88 ,  G01N21/8806

Abstract: A quantitative, high-sensitivity examination of defects in a transparent product is realized, using a low-cost and space-saving optical dimension measuring apparatus to carry out measurement in a non-contact manner to avoid damaging the object of inspection and to avoid sensory examination. A transparent body to be examined is disposed between a light emitting unit and a light-receiving unit arranged opposite each other. A change in an optical path caused by a defect in the transparent body is detected based on a change in a light ray emitted from the light emitting unit and being incident on the light-receiving unit after passing through the transparent body and a light-blocking object disposed between the transparent body and the light-receiving unit.

公开(公告)号：US20140340694A1

公开(公告)日：2014-11-20

申请号：US14277351

申请日：2014-05-14

Applicant: MITUTOYO CORPORATION

Inventor： Shinji FUKUDA ,  Ryoichi IMAIZUMI

IPC: G01B11/08

CPC classification number: G01B11/08 ,  G01B11/2433

Abstract: An optical measuring apparatus includes a light emitter, a scanner, a polarizing plate, a photoreceiver, and a CPU. The light emitter emits a laser beam. The scanner uses the laser beam emitted from the light emitter and scans a measurement region where a work piece is placed. The polarizing plate allows passage for only a laser beam, among the laser beams fired by the scanner, directed orthogonally to an emission direction of the laser beam and an axis direction of the work piece. The photoreceiver receives the laser beam that has passed through the measurement region and the polarizing plate. The CPU calculates a dimension of the work piece from a pattern of light and dark in a scan direction, the pattern being obtained by the photoreceiver.

Abstract translation: 光学测量装置包括光发射器，扫描仪，偏振片，光接收器和CPU。 光发射器发射激光束。 扫描器使用从发光器发射的激光束并扫描放置工件的测量区域。 在由扫描仪发射的激光束中，偏振片仅允许通过激光束，该激光束与激光束的发射方向和工件的轴线方向垂直。 光接收器接收已经通过测量区域和偏振片的激光束。 CPU从扫描方向上的光和暗的图案计算工件的尺寸，该图案由光接收器获得。