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公开(公告)号：US11859969B2
公开(公告)日：2024-01-02
申请号：US17976612
申请日：2022-10-28
发明人： Hideki Morii , Takuya Inoue
摘要： A measurement device includes: a probe part including a probe configured to measure a surface of an object to be measured and is attached so as to swing around a swing center according to a shape of the surface of the object to be measured; a scale configured to measure displacement by swinging of the probe part; a scale head configured to read a scale mark of the scale; and an arm part to which the probe part is attached, the arm part is attached so as to swing around the swing center integrally with the probe part, and the scale is attached to the arm part. When thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, the measurement device satisfies a condition of (α+γ)−1/2α≤β≤(α+γ)+1/2α.
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公开(公告)号：US11817335B2
公开(公告)日：2023-11-14
申请号：US17010885
申请日：2020-09-03
发明人： Kippei Sugita , Kenji Nagai
CPC分类号： H01L21/67253 , G01B5/0014 , G01K11/125 , G01N21/25 , G01N21/45 , G01N21/9501 , H01L21/67248 , H01L21/67288
摘要： A system configured to inspect a processing apparatus includes a temperature adjusting device configured to adjust a temperature of a component within a processing chamber of the processing apparatus; a light source configured to emit measurement light; multiple optical elements configured to output the measurement light emitted from the light source to the component within the processing chamber of the processing apparatus as output light and configured to receive reflected light from the component during a temperature adjustment of the component by the temperature adjusting device; and a controller configured to measure temperatures of the component at measurement points respectively corresponding to the multiple optical elements based on the reflected light, and make a determination upon abnormality of the processing apparatus based on comparisons of the temperatures of the component at the respective measurement points.
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公开(公告)号：US20230221102A1
公开(公告)日：2023-07-13
申请号：US18185610
申请日：2023-03-17
发明人： Tao Xian , Chen Feng , Paul Poloniewicz , Scott Bracken
IPC分类号： G01B5/00 , G06V10/141 , G06T7/521
CPC分类号： G01B5/0014 , G06V10/141 , G06T7/521 , G06V2201/12
摘要： An optical dimensioning system includes one or more light emitting assemblies configured to project one or more predetermined patterns on an object; an imaging assembly configured to sense light scattered and/or reflected off the object, and to capture an image of the object while the patterns are projected; and a processing assembly configured to analyze the image of the object to determine one or more dimension parameters of the object. The light emitting assembly may include a single piece optical component configured for producing a first pattern and second pattern. The patterns may be distinguishable based on directional filtering, feature detection, feature shift detection, or the like. A method for optical dimensioning includes illuminating an object with at least two detectable patterns; and calculating dimensions of the object by analyzing pattern separate of the elements comprising the projected patterns. One or more pattern generators may produce the patterns.
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公开(公告)号：US20190195626A1
公开(公告)日：2019-06-27
申请号：US16200418
申请日：2018-11-26
发明人： Claudio ISELI , John STIGWALL , Thomas JENSEN , Frank PRZYGODDA
CPC分类号： G01B21/042 , G01B5/0014 , G01B5/008 , G01B11/2433 , G06K9/6289 , G06K2209/19 , G06T1/0014
摘要： A machine state monitoring system for recurrently determining a change in static or dynamic properties of a geometry of a machine with positional encoders to derive a coordinate information of at least a first machine portion with respect to a second machine portion, which are movable with respect to one another. The monitoring system includes one calibration-monitoring-unit with an optical, at least two-dimensional measuring location sensing unit which is fixed to the first machine portion and configured to optically sense an at least two dimensional location information of an artifact which is provided at the second machine portion, and temporarily moved into a sensing range for determining the change in the static or dynamic properties of the geometry of the machine by a comparison of multiple of such sensings, the compensation parameters are then updated and is used to derive the coordinate information from the encoders.
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公开(公告)号：US20190170011A1
公开(公告)日：2019-06-06
申请号：US15832376
申请日：2017-12-05
发明人： Eli Cole Warren , Kevin A Ford
CPC分类号： F01D21/003 , F04D29/526 , F05D2220/32 , F05D2230/20 , F05D2240/14 , F05D2260/83 , G01B5/0014 , G01B7/14 , G01H1/006 , G01H11/06
摘要： A low profile embedded BTC probe may comprise a housing having a cavity disposed radially outward of a blade, a lower insulator disposed within the cavity, a sensor element disposed within the cavity, an upper insulator disposed within the cavity, a cap wherein the cap fills a remainder of the cavity, and a hard lead in electronic communication with the sensor element and the housing.
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公开(公告)号：US20180299257A1
公开(公告)日：2018-10-18
申请号：US15937119
申请日：2018-03-27
申请人： MITUTOYO CORPORATION
CPC分类号： G01B11/08 , G01B5/0014 , G01B11/2433 , G02B26/12 , G02B26/121 , G02B26/125 , H02K9/22 , H05K5/03 , H05K7/20436
摘要： An optical outer diameter measurement apparatus includes a rotary device driven to rotate by a motor to convert light emitted from a light-emitting element into scanning light, a collimator lens configured to convert the scanning light into parallel scanning light that is projected toward an object to be measured, a condenser lens configured to condense the parallel scanning light having passed by the object to be measured, a light-receiving element configured to receive light condensed by the condenser lens, a housing that accommodates the rotary device and the collimator lens, and an optical-path cover including, in the housing, two walls extending in a scanning direction of the scanning light and located opposite each other with the scanning light between the two walls.
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公开(公告)号：US20180266817A1
公开(公告)日：2018-09-20
申请号：US15916688
申请日：2018-03-09
申请人： MITUTOYO CORPORATION
CPC分类号： G01B21/20 , G01B5/0014 , G01B5/008 , G01B21/045
摘要： A profile measuring machine includes: a first column and a second column forming a portal structure of a movement mechanism supporting a probe; a first guide made of a first material and configured to guide the first column; a second guide provided in parallel to the first guide, made of a second material different from the first material, and configured to guide the second column; a first support supporting the first guide on a foundation; a second support supporting the second guide on the foundation; and a thermal expansion compensator configured to compensate a difference in thermal expansion between the first guide and the second guide.
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公开(公告)号：US20180216925A1
公开(公告)日：2018-08-02
申请号：US15939418
申请日：2018-03-29
发明人： Yukiko YASUDA , Ichiro TOKUNAGA , Taku SAITO
摘要： A movement unit is provided with a first magnet and a second magnet. A detection unit includes a first magnetic sensor having an axis of sensitivity and a second magnetic sensor having an axis of sensitivity different from the axis of sensitivity of the first magnetic sensor. The movement unit and the detection unit are movable relatively to each other along a movement trajectory. The first and second magnets have facing surfaces, each of which is a projecting curved surface having a shape such that both ends thereof are positioned farther away from the movement trajectory than a center portion thereof. This shape can suppress the linearity error for measured values when the first and second magnets are demagnetized in a high-temperature environment.
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公开(公告)号：US09989347B2
公开(公告)日：2018-06-05
申请号：US14890024
申请日：2014-05-12
申请人： RENISHAW PLC
发明人： Kevyn B Jonas , Ingrid M Östin
CPC分类号： G01B5/008 , G01B5/0014 , G01B21/045
摘要： A series of nominally identical workpieces is received from a manufacturing process and measured on a measuring apparatus. They are received at a non-ambient temperature because of heat introduced during the manufacturing process, but they are placed on the measuring apparatus in a repeatable manner, e.g. by a robot, such that their non-ambient temperatures when measured are repeatable. One of the workpieces is measured as a reference workpiece at the non-ambient temperature, and these measurements are compared to calibrated values obtained from an external source, in order to generate an error map or error function. The error map or error function is used to correct measurements of subsequent workpieces of the series which are measured at the repeatable non-ambient temperature.
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公开(公告)号：US09689757B2
公开(公告)日：2017-06-27
申请号：US14428522
申请日：2013-09-27
申请人： KISTLER HOLDING AG
发明人： Thomas Cadonau
CPC分类号： G01L1/18 , G01B5/0014 , G01B7/18 , G01L1/2206 , G01L1/2262
摘要： A strain transmitter for detecting strain of a structure includes a strain body, which has a strain axis with fastening devices for fastening the strain body on a structure, and a measurement element, which is arranged centrally between the fastening devices on the strain axis. The measurement element includes a metal sheet. The entire surface of a statically measuring, piezo-resistant silicon chip, which is connected to a full bridge and emits a voltage in the strained state proportional to the level of strain, is applied to the metal sheet. The measurement element includes a printed circuit board, and electric contacts are guided from the silicon chip along the printed circuit board.
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