公开(公告)号：US20170248416A1

公开(公告)日：2017-08-31

申请号：US15430593

申请日：2017-02-13

Applicant: MITUTOYO CORPORATION

Inventor： Hiroshi SAKAI ,  Tetsuya ITO ,  Ken MOTOHASHI

IPC: G01B11/30 ,  G01B11/24

CPC classification number: G01B11/306 ,  G01B5/003 ,  G01B5/061 ,  G01B5/12 ,  G01B11/0608 ,  G01B11/12 ,  G01B11/2441 ,  G01B11/303

Abstract: A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a θ axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.