公开(公告)号：US20210373054A1

公开(公告)日：2021-12-02

申请号：US16887346

申请日：2020-05-29

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Benjamin J. GITLIN ,  Mariusz OLDZIEJ ,  Aaron M. BURRY ,  Matthew G. HARRINGTON ,  Aaron T. RADOMSKI

IPC: G01R23/16 ,  G01R29/02 ,  H01J37/32

Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

公开(公告)号：US20220005674A1

公开(公告)日：2022-01-06

申请号：US17480993

申请日：2021-09-21

Applicant: MKS Instruments, Inc. ,  LAM RESEARCH CORPORATION

Inventor： Aaron T. RADOMSKI ,  Benjamin J. GITLIN ,  Larry J. FISK, II ,  Mariusz OLDZIEJ ,  Aaron M. BURRY ,  Jonathan W. SMYKA ,  Alexei MARAKHTANOV ,  Bing JI ,  Felix Leib KOZAKEVICH ,  John HOLLAND ,  Ranadeep BHOWMICK

IPC: H01J37/32

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.