公开(公告)号：US20220165545A1

公开(公告)日：2022-05-26

申请号：US17102598

申请日：2020-11-24

Applicant: MKS Instruments, Inc.

Inventor： Aaron M. BURRY ,  Aaron T. RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

公开(公告)号：US20210050185A1

公开(公告)日：2021-02-18

申请号：US16986680

申请日：2020-08-06

Applicant: MKS Instruments, Inc.

Inventor： Linnell MARTINEZ ,  Jonathan W. SMYKA ,  Scott WHITE ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.

公开(公告)号：US20180330921A1

公开(公告)日：2018-11-15

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. RADOMSKI ,  Ky LUU ,  Larry J. FISK, II ,  Ross REINHARDT ,  Matthew G. HARRINGTON ,  Amish RUGHOONUNDON ,  Jesse N. KLEIN ,  Aaron M. BURRY

IPC: H01J37/32 ,  H05H1/46 ,  H01L21/3065

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US20220005674A1

公开(公告)日：2022-01-06

申请号：US17480993

申请日：2021-09-21

Applicant: MKS Instruments, Inc. ,  LAM RESEARCH CORPORATION

Inventor： Aaron T. RADOMSKI ,  Benjamin J. GITLIN ,  Larry J. FISK, II ,  Mariusz OLDZIEJ ,  Aaron M. BURRY ,  Jonathan W. SMYKA ,  Alexei MARAKHTANOV ,  Bing JI ,  Felix Leib KOZAKEVICH ,  John HOLLAND ,  Ranadeep BHOWMICK

IPC: H01J37/32

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

公开(公告)号：US20230041177A1

公开(公告)日：2023-02-09

申请号：US17396901

申请日：2021-08-09

Applicant: MKS Instruments, Inc.

Inventor： Jonathan W. SMYKA ,  Aaron T. RADOMSKI ,  Peter PAUL ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20250069853A1

公开(公告)日：2025-02-27

申请号：US18948593

申请日：2024-11-15

Applicant: MKS Instruments, Inc.

Inventor： Aaron M. BURRY ,  Aaron T. RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) generator includes a power source configured to generate an RF signal applied to the load and a power controller coupled to the power source. The power controller is configured to generate a control signal to vary the RF signal, wherein the control signal adjusts a frequency of the RF signal in accordance with an external RF signal applied to the load. The frequency adjustment is variable in accordance with a cost responsive to a perturbation of the frequency of the RF signal.

公开(公告)号：US20210373054A1

公开(公告)日：2021-12-02

申请号：US16887346

申请日：2020-05-29

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Benjamin J. GITLIN ,  Mariusz OLDZIEJ ,  Aaron M. BURRY ,  Matthew G. HARRINGTON ,  Aaron T. RADOMSKI

IPC: G01R23/16 ,  G01R29/02 ,  H01J37/32

Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.