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公开(公告)号：US20230127693A1
公开(公告)日：2023-04-27
申请号：US17452030
申请日：2021-10-22
Applicant: MKS Instruments, Inc.
Inventor： Chad David Wilson , Gerardo A. Brucker , Junhua Ding
Abstract: Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output representative of a relative concentration of one gas of the binary gas mixture is provided. The relative concentration is determined as a function of the sensed mass flow rate and the sensed total pressure.
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