公开(公告)号：US20230036853A1

公开(公告)日：2023-02-02

申请号：US17391724

申请日：2021-08-02

Applicant: MKS Instruments, Inc.

Inventor： Gordon Hill ,  Andrew Cowe ,  Ron Collins ,  Larry Bourget

IPC: H01J37/32 ,  C23C16/44 ,  C23C16/50

Abstract: A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port. The at least one discharge section includes a return electrode defining a first generally cylindrical interior volume having a first interior diameter, a supply plate comprising a supply electrode, the supply plate defining a second generally cylindrical interior volume having a second interior diameter, and at least one spacer defining a third generally cylindrical interior volume having a third interior diameter. The third interior diameter is different from the first or second interior diameter. The at least one discharge section is formed from the spacer arranged between the return electrode and the supply plate along the central longitudinal axis to define a generally cylindrical discharge gap for generating a plasma therein.

公开(公告)号：US11664197B2

公开(公告)日：2023-05-30

申请号：US17391724

申请日：2021-08-02

Applicant: MKS Instruments, Inc.

Inventor： Gordon Hill ,  Andrew Cowe ,  Ron Collins ,  Larry Bourget

IPC: H01J37/32 ,  C23C16/50 ,  C23C16/44

CPC classification number: H01J37/32541 ,  C23C16/4405 ,  C23C16/50 ,  H01J37/32577 ,  H01J37/32862

Abstract: A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port. The at least one discharge section includes a return electrode defining a first generally cylindrical interior volume having a first interior diameter, a supply plate comprising a supply electrode, the supply plate defining a second generally cylindrical interior volume having a second interior diameter, and at least one spacer defining a third generally cylindrical interior volume having a third interior diameter. The third interior diameter is different from the first or second interior diameter. The at least one discharge section is formed from the spacer arranged between the return electrode and the supply plate along the central longitudinal axis to define a generally cylindrical discharge gap for generating a plasma therein.