公开(公告)号：US20210050185A1

公开(公告)日：2021-02-18

申请号：US16986680

申请日：2020-08-06

Applicant: MKS Instruments, Inc.

Inventor： Linnell MARTINEZ ,  Jonathan W. SMYKA ,  Scott WHITE ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.