公开(公告)号：US20210050185A1

公开(公告)日：2021-02-18

申请号：US16986680

申请日：2020-08-06

Applicant: MKS Instruments, Inc.

Inventor： Linnell MARTINEZ ,  Jonathan W. SMYKA ,  Scott WHITE ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.

公开(公告)号：US20180294141A1

公开(公告)日：2018-10-11

申请号：US16005761

申请日：2018-06-12

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jonathan W. SMYKA

IPC: H01J37/32

CPC classification number: H01J37/32155 ,  H01J37/32146 ,  H01J37/32174 ,  H01J37/32935 ,  H01J37/3299 ,  H01J2237/332 ,  H01J2237/334

Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

公开(公告)号：US20220005674A1

公开(公告)日：2022-01-06

申请号：US17480993

申请日：2021-09-21

Applicant: MKS Instruments, Inc. ,  LAM RESEARCH CORPORATION

Inventor： Aaron T. RADOMSKI ,  Benjamin J. GITLIN ,  Larry J. FISK, II ,  Mariusz OLDZIEJ ,  Aaron M. BURRY ,  Jonathan W. SMYKA ,  Alexei MARAKHTANOV ,  Bing JI ,  Felix Leib KOZAKEVICH ,  John HOLLAND ,  Ranadeep BHOWMICK

IPC: H01J37/32

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

公开(公告)号：US20170062187A1

公开(公告)日：2017-03-02

申请号：US15236661

申请日：2016-08-15

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. RADOMSKI ,  Sang Won LEE ,  Larry J. FISK, II ,  Jonathan W. SMYKA

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/32155

Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.

Abstract translation: 一种RF供电系统，其中偏置RF发生器以第一频率操作以提供偏置RF输出信号，并且源RF发生器以第二频率操作以提供源RF输出信号。 RF输出功率信号被施加到负载，例如等离子体室。 源RF发生器检测触发​​事件。 响应于触发事件，源RF发生器启动向源RF输出信号添加频率偏移，以响应相对于触发事件发生的等离子体室中的阻抗波动。 由源RF发生器检测到的触发事件可以以偏置RF发射器的形式从控制信号的形式接收，该控制信号根据偏置RF输出信号而变化。

公开(公告)号：US20230041177A1

公开(公告)日：2023-02-09

申请号：US17396901

申请日：2021-08-09

Applicant: MKS Instruments, Inc.

Inventor： Jonathan W. SMYKA ,  Aaron T. RADOMSKI ,  Peter PAUL ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20210013007A1

公开(公告)日：2021-01-14

申请号：US16905377

申请日：2020-06-18

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jonathan W. SMYKA

IPC: H01J37/32

Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

公开(公告)号：US20190214231A1

公开(公告)日：2019-07-11

申请号：US16273595

申请日：2019-02-12

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jonathan W. SMYKA

IPC: H01J37/32

Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.