公开(公告)号：US20210293644A1

公开(公告)日：2021-09-23

申请号：US16825994

申请日：2020-03-20

Applicant: MKS Instruments, Inc.

Inventor： Phillip W. Sullivan ,  Sergei Syssoev ,  Ethan E. Manor ,  Swaminathan Venkatesan ,  Paul D. Lucas

IPC: G01L9/00 ,  G01N27/22 ,  G01L9/12 ,  G01L13/02

Abstract: A capacitance manometer is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.

公开(公告)号：US11287342B2

公开(公告)日：2022-03-29

申请号：US16825994

申请日：2020-03-20

Applicant: MKS Instruments, Inc.

Inventor： Philip W. Sullivan ,  Sergei Syssoev ,  Ethan E. Mattor ,  Swaminathan Venkatesan ,  Paul D. Lucas

IPC: G01L9/00 ,  G01L13/02 ,  G01L9/12 ,  G01N27/22

Abstract: A capacitive manometer offering improved measurement accuracy is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle less prone to transient measurement errors having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.