公开(公告)号：US11287342B2

公开(公告)日：2022-03-29

申请号：US16825994

申请日：2020-03-20

Applicant: MKS Instruments, Inc.

Inventor： Philip W. Sullivan ,  Sergei Syssoev ,  Ethan E. Mattor ,  Swaminathan Venkatesan ,  Paul D. Lucas

IPC: G01L9/00 ,  G01L13/02 ,  G01L9/12 ,  G01N27/22

Abstract: A capacitive manometer offering improved measurement accuracy is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle less prone to transient measurement errors having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.

公开(公告)号：US09562820B2

公开(公告)日：2017-02-07

申请号：US14072188

申请日：2013-11-05

Applicant: MKS Instruments, Inc.

Inventor： Lei Gu ,  Paul D. Lucas ,  Stephen F. Bart ,  Philip W. Sullivan

IPC: G01L7/08 ,  G01L19/00 ,  G01L9/00

CPC classification number: G01L19/0092 ,  G01L9/0072

Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.

Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。