公开(公告)号：US10458917B2

公开(公告)日：2019-10-29

申请号：US15864340

申请日：2018-01-08

Applicant: MKS Technology, Inc.

Inventor： Keith T. Carron ,  Celestin P. Zemtsop ,  Shane A. Buller ,  Scott L. Rudder ,  Harald R. Guenther

IPC: G01N21/65

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：US20180195965A1

公开(公告)日：2018-07-12

申请号：US15864340

申请日：2018-01-08

Applicant: MKS Technology, Inc.

Inventor： Keith T. Carron ,  Celestin P. Zemtsop ,  Shane A. Buller ,  Scott L. Rudder ,  Harald R. Guenther

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N2201/06113 ,  G01N2201/0683

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.