公开(公告)号：US20180095111A1

公开(公告)日：2018-04-05

申请号：US15709620

申请日：2017-09-20

Applicant: MPI Corporation

Inventor： Chin-Yi Tsai ,  Chen-Chih Yu ,  Yi-Chia Huang ,  Cheng-Nien Su ,  Chung-Chi Lin

IPC: G01R1/067 ,  G01R1/073

CPC classification number: G01R1/06733 ,  G01R1/07314 ,  G01R1/07342

Abstract: A coaxial probe card device includes a substrate, a plurality of probe holders, and a plurality of probes. The substrate has a through hole. The plurality of probe holders is disposed on the substrate and is configured in a radial manner surrounding the through hole by using the through hole of the substrate as a center. Each probe holder has a probe slot, and the probe slot is inclined with respect to a surface of the substrate and extends towards the through hole of the substrate. The probes are individually disposed in the probe slots of the probe holders.

公开(公告)号：US12025637B2

公开(公告)日：2024-07-02

申请号：US17499990

申请日：2021-10-13

Applicant: MPI Corporation

Inventor： Chin-Yi Tsai ,  Chia-Tai Chang ,  Cheng-Nien Su ,  Chin-Tien Yang ,  Chen-Chih Yu

IPC: G01R1/073

CPC classification number: G01R1/07342

Abstract: The present invention provides a probe card comprising a probe base, at least one impedance-matching probes, and a plurality of first probes. The probe base has a probing side and a tester side opposite to the probing side. Each impedance-matching probe has a probing part and a signal transmitting part electrically coupled to the probing part, wherein one end of the signal transmitting part is arranged at tester side, and the signal transmitting part has a central probing axis. Each first probe has a probing tip and a cantilever part coupled to the probing tip, wherein the cantilever part is coupled to the probe base and has a first central axis such that an included angle is formed between the central probing axis and the first central axis.

公开(公告)号：US20220113334A1

公开(公告)日：2022-04-14

申请号：US17499990

申请日：2021-10-13

Applicant: MPI Corporation

Inventor： Chin-Yi Tsai ,  Chia-Tai Chang ,  Cheng-Nien Su ,  Chin-Tien Yang ,  Chen-Chih Yu

IPC: G01R1/073

Abstract: The present invention provides a probe card comprising a probe base, at least one impedance-matching probes, and a plurality of first probes. The probe base has a probing side and a tester side opposite to the probing side. Each impedance-matching probe has a probing part and a signal transmitting part electrically coupled to the probing part, wherein one end of the signal transmitting part is arranged at tester side, and the signal transmitting part has a central probing axis. Each first probe has a probing tip and a cantilever part coupled to the probing tip, wherein the cantilever part is coupled to the probe base and has a first central axis such that an included angle is formed between the central probing axis and the first central axis.