公开(公告)号：US10753960B2

公开(公告)日：2020-08-25

申请号：US16157911

申请日：2018-10-11

Applicant: MPI Corporation

Inventor： Hao Wei ,  Chia-Nan Chou ,  Chien-Chiao Chen ,  Chia-An Yu ,  Yu-Hao Chen

IPC: G01R1/073 ,  H05K1/18 ,  H05K1/11 ,  G01R1/067 ,  G01R31/28

Abstract: A probe card includes a printed circuit board (PCB), a connection substrate electrically connected with the PCB, a probe head, and a signal path switching module disposed on a lateral periphery surface or a bottom surface of the connection substrate, electrically connected with probe needles of the probe head and the connection substrate and including first and second circuit lines with first and second inductors respectively, and a capacitor electrically connected between the first and second circuit lines. A test signal from a tester is transmitted between the tester and a device under test (DUT) via the PCB, the connection substrate, the first and second circuit lines and the probe needles. A loopback test signal from the DUT is transmitted back to the DUT via the probe needles, parts of the first and second circuit lines and the capacitor.