公开(公告)号：US20210181237A1

公开(公告)日：2021-06-17

申请号：US17118564

申请日：2020-12-10

Applicant: MPI Corporation

Inventor： Zhi-Wei SU ,  Tzung-Je TZENG ,  Wen-Chi CHEN ,  Huo-Kang HSU ,  Hsueh-Chih WU ,  Sheng-Wei LIN ,  Chin-Yi LIN ,  Che-Wei LIN ,  Jian-Kai HONG ,  Shu-Jui CHANG

IPC: G01R1/073 ,  G01R1/067 ,  G01R31/28

Abstract: A positionable probe card includes a space transformer, a plurality of positioning pins, and a probe head. The space transformer includes a space transforming substrate, the space transforming substrate includes a plurality of apertures, and the positioning pins are respectively fixed in the apertures. The probe head includes a plurality of positioning holes, and the positioning pins are respectively inserted into corresponding positioning holes. In addition, a method of manufacturing a positionable probe card is also disclosed herein.