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    Optimal buffer space configuration and scheduling for single-arm multi-cluster tools
    3.
    发明授权
    Optimal buffer space configuration and scheduling for single-arm multi-cluster tools 有权
    单臂多集群工具的最优缓冲空间配置和调度

    公开(公告)号：US09227318B1

    公开(公告)日：2016-01-05

    申请号：US14639137

    申请日：2015-03-05

    Applicant: Macau University of Science and Technology

    Inventor： Liping Bai ,  Naiqi Wu ,  Zhiwu Li ,  Mengchu Zhou

    IPC: G06F19/00 ,  B25J9/00 ,  G05B19/418 ,  G06F17/50

    CPC classification number: B25J9/009 ,  G05B19/41865 ,  G05B2219/45032 ,  G06F17/5013 ,  H01L21/67184 ,  H01L21/67276 ,  Y10S901/02 ,  Y10S901/41

    Abstract: A method for scheduling single-arm multi-cluster tools is provided. The present invention studies the scheduling problem of a single-arm multi-cluster tool with a linear topology and process-bound bottleneck individual tool. Its objective is to find a one-wafer cyclic schedule such that the lower bound of cycle time is reached by optimally configuring spaces in buffering modules that link individual cluster tools. A Petri net model is developed to describe the dynamic behavior of the system by extending resource-oriented Petri nets such that a schedule can be parameterized by robots' waiting time. Based on this model, conditions are presented under which a one-wafer cyclic schedule with lower bound of cycle time can be found. With the derived conditions, an algorithm is presented to find such a schedule and optimally configure the buffer spaces.

    Abstract translation: 提供了一种用于调度单臂多群集工具的方法。 本发明研究了具有线性拓扑和过程限制瓶颈的单个工具的单臂多群集工具的调度问题。 其目的是找到一个单晶圆循环调度，以便通过在链接各个集群工具的缓冲模块中最佳配置空间来达到循环时间的下限。 Petri网模型被开发用于通过扩展资源导向的Petri网来描述系统的动态行为，使得可以通过机器人的等待时间对时间表进行参数化。 基于该模型，提出了可以找到具有周期时间下限的单晶片循环调度的条件。 使用派生条件，提出了一种算法来查找这样的调度并最佳地配置缓冲区空间。

    Multi cluster tool system and a method of controlling a multi tool cluster system
    4.
    发明授权
    Multi cluster tool system and a method of controlling a multi tool cluster system 有权

    公开(公告)号：US10520914B2

    公开(公告)日：2019-12-31

    申请号：US15268851

    申请日：2016-09-19

    Applicant: Macau University of Science and Technology

    Inventor： Naiqi Wu ,  Fajun Yang ,  Liping Bai ,  Mengchu Zhou ,  Zhiwu Li

    IPC: G05B19/29 ,  G05B19/418

    Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.

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