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公开(公告)号：US12222537B2
公开(公告)日：2025-02-11
申请号：US18729437
申请日：2023-01-20
Applicant: Magic Leap, Inc.
Inventor： Matthew C Traub , Yingnan Liu , Vikramjit Singh , Frank Y. Xu , Robert D. Tekolste , Qizhen Xue , Samarth Bhargava , Victor Kai Liu , Brandon Michael-James Born , Kevin Messer
Abstract: The disclosure describes an improved drop-on-demand, controlled volume technique for dispensing resist onto a substrate, which is then imprinted to create a patterned optical device suitable for use in optical applications such as augmented reality and/or mixed reality systems. The technique enables the dispensation of drops of resist at precise locations on the substrate, with precisely controlled drop volume corresponding to an imprint template having different zones associated with different total resist volumes. Controlled drop size and placement also provides for substantially less variation in residual layer thickness across the surface of the substrate after imprinting, compared to previously available techniques. The technique employs resist having a refractive index closer to that of the substrate index, reducing optical artifacts in the device. To ensure reliable dispensing of the higher index and higher viscosity resist in smaller drop sizes, the dispensing system can continuously circulate the resist.
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公开(公告)号：US12204258B2
公开(公告)日：2025-01-21
申请号：US18014327
申请日：2021-08-06
Applicant: Magic Leap, Inc.
Inventor： Jeremy Lee Sevier , Satish Sadam , Joseph Michael Imhof , Kang Luo , Kangkang Wang , Roy Matthew Patterson , Qizhen Xue , Brett William Best , Charles Scott Carden , Matthew S. Shafran , Michael Nevin Miller
Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.
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公开(公告)号：US11360385B1
公开(公告)日：2022-06-14
申请号：US16518547
申请日：2019-07-22
Applicant: Magic Leap, Inc.
Inventor： Huihang Dong , Thomas Mercier , Vikramjit Singh , Kang Luo , Tasha Amit Mangaldas , William Hudson Welch , Qizhen Xue , Frank Y. Xu
IPC: G03F7/00
Abstract: Methods and systems for manufacturing an optical waveguide include depositing an adhesion promoting layer on a substrate. Multiple curable resist droplets are dispensed on the adhesion promoting layer. The adhesion promoting layer is disposed between and contacts the substrate and the curable resist droplets. The curable resist droplets define an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the curable resist droplets. The optical eyepiece layer is incised from the substrate to form the optical waveguide.
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公开(公告)号：US20240418928A1
公开(公告)日：2024-12-19
申请号：US18729437
申请日：2023-01-20
Applicant: Magic Leap, Inc.
Inventor： Matthew C Traub , Yingnan Liu , Vikramjit Singh , Frank Y. Xu , Robert D. Tekolste , Qizhen Xue , Samarth Bhargava , Victor Kai Liu , Brandon Michael-James Born , Kevin Messer
Abstract: The disclosure describes an improved drop-on-demand, controlled volume technique for dispensing resist onto a substrate, which is then imprinted to create a patterned optical device suitable for use in optical applications such as augmented reality and/or mixed reality systems. The technique enables the dispensation of drops of resist at precise locations on the substrate, with precisely controlled drop volume corresponding to an imprint template having different zones associated with different total resist volumes. Controlled drop size and placement also provides for substantially less variation in residual layer thickness across the surface of the substrate after imprinting, compared to previously available techniques. The technique employs resist having a refractive index closer to that of the substrate index, reducing optical artifacts in the device. To ensure reliable dispensing of the higher index and higher viscosity resist in smaller drop sizes, the dispensing system can continuously circulate the resist.
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