公开(公告)号：US20230296993A1

公开(公告)日：2023-09-21

申请号：US18014327

申请日：2021-08-06

Applicant: Magic Leap, Inc.

Inventor： Jeremy Lee SEVIER ,  Satish SADAM ,  Joseph Michael IMHOF ,  Kang LUO ,  Kangkang WANG ,  Roy Matthew PATTERSON ,  Qizhen XUE ,  Brett William BEST ,  Charles Scott CARDEN ,  Matthew S. SHAFRAN ,  Michael Nevin MILLER

IPC: G03F9/00 ,  G03F7/00

CPC classification number: G03F9/7042 ,  G03F7/0002 ,  G03F9/7011 ,  G03F9/7046

Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.